Electrostatic Chuck Corner Through Holes for Adsorption Uniformity
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Solution Overview
Problem
Existing electrostatic chucks face challenges in uniformly adsorbing objects of various sizes without forming bubbles, particularly due to differences in adhesion force and pressing force at the corners of the adsorbing surface.
Innovation Solution
An electrostatic chuck design featuring a base with a cushion layer, electrode layer, and dielectric layer, including through holes with specific dimensions and arrangements, and a cushion layer made of polyethylene, which allows for uniform electrostatic adsorption and reduced bubble formation across different object sizes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional electrostatic chuck design is used, then it can adsorb objects, but bubbles occur due to non-uniform pressing force at corners
Solution Approach 1:
The patent introduces through holes specifically at corner regions where pressing force is highest, creating local structural differences. These corner through holes reduce the local pressing force at corners while maintaining uniform adsorption across the entire object surface, preventing bubble formation at critical corner areas.
Solution Approach 2:
The adsorbing surface is segmented into multiple regions by introducing through holes at corner positions. This segmentation divides the continuous adsorbing surface into distinct zones with different pressing force characteristics, allowing independent control of pressure distribution to eliminate bubbles while maintaining overall adsorption effectiveness.
2Reliability
If the electrostatic chuck is designed for specific object sizes, then adsorption is effective, but it cannot accommodate objects of various sizes
Solution Approach 1:
The electrostatic chuck is designed with through holes at corner positions that serve multiple functions: they reduce corner pressing force to prevent bubbles, and simultaneously provide adaptable pressure distribution for objects of various sizes. This universal design allows the same chuck structure to effectively adsorb different object dimensions without requiring redesign.
Solution Approach 2:
The through hole configuration enables dynamic adaptation to different object sizes. The corner through holes provide a baseline pressure reduction that works across various object dimensions, allowing the electrostatic chuck to maintain effective adsorption for different sized objects by naturally adjusting the pressure distribution pattern.
3Object-affected harmful factors
If through holes are added to reduce bubble formation, then bubble occurrence decreases, but the structure becomes more complex
Solution Approach 1:
Rather than modifying the entire adsorbing surface structure, the patent applies through holes only at specific corner regions where bubbles most commonly form. This localized modification achieves bubble prevention with minimal additional structural complexity, maintaining simplicity in the majority of the adsorbing surface area.
Solution Approach 2:
The structure is segmented by adding through holes only at corner positions rather than uniformly across the entire surface. This selective segmentation minimizes the number of additional structural elements required while achieving the bubble prevention function, thereby limiting the increase in structural complexity to only the necessary minimum.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The electrostatic chuck effectively prevents or reduces bubble occurrence and supports the adsorption of objects of various sizes by minimizing differences in pressing force through the strategic arrangement of through holes and the use of a polyethylene cushion layer, enhancing the uniformity and stability of the adsorption process.
Implementation Method 1
an electrostatic force is formed by potentials charged in electrodes of the electrostatic chuck and an object to be adsorbed (e.g., held by the electrostatic chuck). The force may be an electrostatic force or the like.
Implementation Method 2
a cushion layer on the base... The cushion layer may have a thickness in a range of 0.2 mm to 0.3 mm. The cushion layer may include polyethylene.
Data Source
AI summary
An electrostatic chuck and an electrostatic adsorption apparatus including the same are disclosed. The electrostatic chuck includes a base, a cushion layer on the base, an electrode layer on the cushion layer, and a dielectric layer on the electrode layer, the base, the cushion layer, the electrode layer, and the dielectric layer have through holes. The through holes each have a rectangular shape, and each corner region of the dielectric layer has a pair of the through holes, and the central axes of the pair of the through holes respectively intersect two adjacent sides of the dielectric layer at the respective corner region.