Electrostatic Chuck Terminal Reliability at Cryogenic Temperatures
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Solution Overview
Problem
Conventional electrostatic attraction apparatuses face reliability issues in maintaining electrical connections between power supplying terminals and wiring lines at extremely low temperatures, as adhesives and vacuum seals can embrittle, compromising the connection's integrity.
Innovation Solution
The electrostatic attraction apparatus incorporates a terminal member with a contact part that is urged onto the power supplying terminal by an urging unit, eliminating the need for adhesives and vacuum seals, and features a conductor pattern with power supplying terminals on a second insulating layer on the base's second face, ensuring reliable connections even at low temperatures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the power supplying terminal is formed on the first face of the base, then the electrical connection is simplified, but the terminal is subjected to pressurization damage from the urging unit
Solution Approach 1:
The patent moves the power supplying terminal from the first face (upper surface) of the base to the second face (lower surface) of the base. This spatial relocation allows the urging unit to press against the terminal member from below without directly pressurizing the power supplying terminal itself, thereby protecting the terminal from pressurization damage while maintaining electrical connection functionality
Solution Approach 2:
The patent introduces the terminal member as an intermediary element between the urging unit and the power supplying terminal. The terminal member receives the pressing force from the urging unit and transfers it to the power supplying terminal in a controlled manner, preventing direct and damaging pressurization of the terminal while ensuring reliable electrical contact
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration secures the electrical connection between the power supplying terminal and the wiring line without adhesives or vacuum seals, preventing damage from pressurization and maintaining reliability across a temperature range of −263° C. to −60° C., thus ensuring consistent operation in extreme cold environments.
Implementation Method 1
an urging unit, configured to press the contact part of the terminal member to the power supplying terminal
Implementation Method 2
The electrostatic attraction apparatus attracts and holds the processing target object on the electrostatic chuck according to an electrostatic force
Data Source
AI summary
Provided is an electrostatic attraction apparatus in which a first insulating layer is formed on a base in an electrostatic chuck. A first portion of the first insulating layer extends on a first face of the base and a second portion of the first insulating layer extends on at least a portion of a second face of the base. An attraction electrode is formed on the first portion of the first insulating layer. A second insulating layer is formed on the first portion of the first insulating layer and the attraction electrode. A conductor pattern extends from the attraction electrode and provides a power supply terminal on the second portion of the first insulating layer. A contact part of a terminal member urged by an urging unit is in contact with the power supply terminal. The terminal member is connected with a wiring line connected to a supply power.