Electrostatic Chuck Joint Structure for Curved Surface Gripping
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Solution Overview
Problem
Existing electrostatic chucks have limited adsorptive power for objects with curved surfaces and are not suitable for dielectric materials, as they rely on distance-dependent electrostatic force, which reduces their effectiveness for flexible or curved objects.
Innovation Solution
An electrostatic adsorption module with a bipolar adsorption surface and a support member that allows elastic displacement and rotational freedom, enabling flexible adaptation to curved surfaces by adjusting the orientation of the adsorption plane and increasing the adsorptive power and load capacity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If conventional electrostatic chucks are used for flat surfaces, then adsorptive power is sufficient, but they cannot effectively grip objects with curved surfaces due to distance-dependent electrostatic force
Solution Approach 1:
The electrostatic chuck incorporates a flexible adsorption surface that can dynamically deform to match curved object geometries. The adsorption surface is constructed with flexible materials and结构设计 that allow it to bend and conform to various curvatures, enabling effective electrostatic gripping of both flat and curved surfaces including cylindrical objects.
Solution Approach 2:
The adsorption surface utilizes flexible thin film structures that can elastically deform to contact curved surfaces. This flexible membrane design allows the electrostatic chuck to adapt its shape to match the object being gripped, maintaining effective electrostatic force distribution across curved geometries.
2Force
If electrostatic force is increased to improve gripping capability, then load capacity increases, but excessive stress is applied to delicate materials like plastic films and organic EL panels
Solution Approach 1:
The electrostatic chuck employs localized electrode regions with varying electrical properties. Different areas of the adsorption surface have electrodes with different densities, sizes, or voltages applied, allowing high gripping force on robust areas of the object while applying lower stress to delicate regions, thus preventing damage to thin materials.
Solution Approach 2:
The system dynamically adjusts electrostatic parameters including voltage magnitude, electrode activation patterns, and adsorption surface flexibility to match the mechanical properties of the gripped object. This parameter control enables high load capacity for sturdy objects while reducing stress for delicate materials like plastic films and organic EL panels.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The module effectively grips and detaches flexible or curved objects with increased adsorptive power and load capacity, adapting to both fine and large curved surfaces without applying excessive stress, suitable for handling delicate materials like plastic films and organic EL panels.
Implementation Method 1
The mechanism of an electrostatic chuck creates a difference in potential between itself and the gripped object using electrodes, with the generated electrostatic force adsorbing the gripped object
Implementation Method 2
such mechanism may be a Coulomb force type using an insulating material as the dielectric material
Implementation Method 3
allowing the tip of the electrostatic adsorption device to be elastically displaced in the near and far direction with respect to the object to be adsorbed
Implementation Method 4
applying a joint with rotational freedom to permit change in the orientation of the electrostatic adsorption plane in the rotational direction
Data Source
AI summary
The adsorptive power and load capacity of an electrostatic chuck is vastly improved by maintaining an optimal state for in-plane stress produced at the interface between an adsorption surface and an object. The electrostatic adsorption module of the invention comprises a tip member having a bipolar adsorption surface and a support member that supports the tip member, wherein the tip member as a whole can be elastically displaced in the near and far direction with respect to the object to be adsorbed, and the tip member and the support member are coupled via a freely rotatable joint. The electrostatic adsorption device is provided with multiple tip members with bipolar adsorption surfaces that can be elastically displaced in the near and far direction with respect to the object to be adsorbed, the support member supporting the tip members extending from a substrate and the substrate being deformable. Also provided is an electrostatic adsorption method wherein an electrostatic adsorption module or electrostatic adsorption device is used to adsorb and grip an object to be adsorbed.