Electrostatic Chuck Groove Layout for Uniform Edge Ring Cooling

The diffusion groove is divided into a circumferential groove and multiple radial grooves that extend from the circumferential groove toward the center. This segmentation allows heat transfer gas to be distributed more uniformly across the gap between the annular member and support surface, improving temperature control while maintaining attracting force uniformity.

The radial grooves are positioned to extend from the circumferential groove toward the center of the electrostatic chuck, creating localized gas distribution zones. This local quality approach ensures that heat transfer gas reaches specific regions uniformly, improving overall temperature distribution without compromising the in-plane uniformity of the attracting force.

By dividing the diffusion groove into circumferential and radial components, the gas flow is distributed more evenly, reducing localized pressure changes that cause vibrations. This segmentation allows cooling to be achieved uniformly without inducing harmful vibrations in the edge ring.

The groove configuration changes the flow parameters of the heat transfer gas, directing it through a controlled path that reduces turbulence and pressure fluctuations. This parameter optimization achieves effective cooling while minimizing vibrations.

The diffusion groove structure merges the circumferential groove and radial grooves into a single integrated feature on the support surface. This combination achieves improved heat transfer gas distribution without requiring separate components, thus limiting the increase in device complexity.

The diffusion groove serves multiple functions: it distributes heat transfer gas uniformly, maintains attracting force uniformity, and reduces vibrations. This multi-functionality reduces the need for additional components, offsetting the complexity introduced by the groove structure.