Electrostatic Chuck Electrode Deformation Control
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Solution Overview
Problem
Existing methods for producing electrostatic chucks often result in deformation of the end face of the electrostatic electrode due to stress concentration and electric field concentration, leading to durability issues.
Innovation Solution
The method involves hot-press firing of a stacked calcined body with ceramic calcined bodies sandwiching an electrostatic electrode, using a ceramic slurry with a gelling agent to embed the electrode and ensure uniform particle arrangement, reducing deformation and warpage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If alumina granulated powder is placed on the electrostatic electrode and pressure-molding and firing are performed, then the electrostatic chuck can be manufactured, but the end face of the electrostatic electrode deforms and tapers at an acute angle
Solution Approach 1:
The patent applies preliminary action by forming the electrostatic electrode before placing it in the molding die, and by pre-preparing the ceramic molded bodies. The electrode is formed with a predetermined shape that anticipates the deformation that will occur during firing, allowing the final product to achieve the desired flat end face geometry after the firing process
Solution Approach 2:
The patent employs parameter changes by controlling the composition and properties of the alumina granulated powder, adjusting the binding agent content, and optimizing the pressure-molding and firing parameters. These parameter adjustments prevent excessive deformation of the electrode end face during manufacturing while maintaining ease of production
2Productivity
If the end face of the electrostatic electrode has an acute angle shape, then the manufacturing process is completed, but stress and electric field concentration occur leading to cracks and reduced durability
Solution Approach 1:
The patent applies preliminary anti-action by designing the electrode with a predetermined shape that pre-compensates for the stress and electric field concentrations that would normally occur at acute angles. The electrode geometry is specifically designed to distribute stress and electric fields uniformly, preventing crack formation and enhancing durability before the product is put into service
Solution Approach 2:
The patent changes the geometric parameters of the electrode end face from acute angles to flat surfaces or gentle curves. This parameter modification eliminates stress concentration points and electric field concentration points, thereby preventing cracks and improving reliability without significantly impacting manufacturing efficiency
3Ease of manufacture
If pressure-molding is performed on the stacked body, then the components are integrated, but the electrostatic electrode deforms due to stress concentration
Solution Approach 1:
The patent applies preliminary action by forming the electrostatic electrode with a predetermined shape before integration, and by preparing the ceramic molded bodies in advance. The electrode is designed with a shape that anticipates the pressure-molding process, ensuring it maintains its form during integration while achieving proper bonding of components
Solution Approach 2:
The patent applies local quality by differentiating the properties of different parts of the electrode. The end face is designed with specific geometric characteristics (flat surface or gentle curve) to resist deformation during pressure-molding, while other portions of the electrode maintain their standard geometry for electrical function
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively suppresses deformation of the electrostatic electrode's end face, enhancing durability by preventing stress and electric field concentration, thus ensuring a flat or bulging surface without acute angles.
Implementation Method 1
gelatinizing the ceramic slurry by causing a chemical reaction of the gelling agent
Implementation Method 2
conducting hot-press firing of the stacked calcined body
Data Source
AI summary
A method for producing an electrostatic chuck 10 includes the steps of (a) pouring a ceramic slurry containing a ceramic powder, a solvent, a dispersant, and a gelling agent into a first molding die 31 in which an electrostatic electrode precursor 24 is removably attached to an inner surface of the first molding die 31, gelatinizing the ceramic slurry by causing a chemical reaction of the gelling agent, and then removing the first molding die 31 to prepare an embedded-electrode-containing ceramic molded body 41X in which the electrostatic electrode precursor 24 is embedded in a first ceramic molded body 41; (b) preparing a second ceramic molded body 42; and (c) preparing a stacked calcined body 50 using the embedded-electrode-containing ceramic molded body 41X and the second ceramic molded body 42, and conducting hot-press firing of the stacked calcined body 50.