Electrostatic Chuck Feed Connection for Relaxed Recess Depth Tolerance
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The precise adjustment of the depth of recessed sections in electrostatic chucks is difficult, making it challenging to establish an electrical connection between internal electrodes and feed terminals.
Innovation Solution
The electrostatic chuck design includes a connection section that extends from the recessed section's bottom towards the placement surface, allowing for easier electrical connection between the internal electrode and the feed terminal without the need for precise depth adjustments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the recessed section depth is precisely adjusted to expose the internal electrode at the bottom, then direct electrical connection between the internal electrode and feed terminal is achieved, but the processing difficulty increases significantly
Solution Approach 1:
The electrical connection path is segmented into two parts: the recessed section (which does not need precise depth control) and the connection section (which provides the actual electrical connection). The connection section is a separate conductive element that extends from the recessed section bottom toward the internal electrode, allowing the recessed section to be formed without precise depth adjustment while still achieving reliable electrical connection.
2Ease of manufacture
If the recessed section depth is not precisely adjusted, then processing becomes easier, but direct electrical connection between the internal electrode and feed terminal cannot be established
Solution Approach 1:
The connection section acts as an intermediary element between the feed terminal and the internal electrode. It extends from the recessed section bottom toward the internal electrode, bridging the gap that would otherwise require precise depth adjustment of the recessed section. This intermediary connection section ensures reliable electrical connection while allowing the recessed section to be formed with relaxed depth tolerances.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration facilitates easy and reliable electrical connection between the internal electrode and the feed terminal, reducing processing complexity and ensuring consistent power supply to the RF electrode.
Implementation Method 1
When a voltage is applied to the adsorption electrode, an electrostatic force is generated, and the wafer placed on the dielectric substrate is adsorbed and held
Implementation Method 2
An RF electrode serving as one of a pair of counter electrodes configured to generate plasma in the semiconductor manufacturing apparatus
Data Source
AI summary
An electrostatic chuck 10 includes a dielectric substrate 100, an RF electrode 140 provided inside the dielectric substrate 100, a feed terminal 170 arranged on an inner side of a recessed section 160 which is formed on a surface 120 opposite to a placement surface in the dielectric substrate 100, and a connection section 190 configured to electrically connect the RF electrode 140 with the feed terminal 170. The connection section 190 extends from a bottom 161 of the recessed section 160 toward the placement surface, and extends up to a position closer to the placement surface side than the RF electrode 140.