Electrostatic Chuck Flatness Control for Multi-Chuck Deposition
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Solution Overview
Problem
Existing deposition apparatuses face challenges in maintaining the flatness of electrostatic chucks, leading to potential substrate deformation and defective products due to gravitational sagging and uneven surface contact.
Innovation Solution
A deposition apparatus with multiple electrostatic chucks, including metal and ceramic materials, and a control device using driving shafts to measure and adjust height deviations between chucks, ensuring equal spacing and maintaining substrate flatness through individual control of driving shafts.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple electrostatic chucks are used to support the substrate, then the substrate can be securely fixed, but height deviations between chucks cause flatness issues
Solution Approach 1:
The driving shafts are designed to be adjustable in length, allowing the electrostatic chucks to dynamically adapt their positions. This enables the system to compensate for height deviations and maintain substrate flatness while securely fixing the substrate through multiple chucks.
Solution Approach 2:
The system changes the physical parameter of the driving shaft length to adjust the position of each electrostatic chuck. By varying the shaft length, the system compensates for height deviations between chucks, ensuring the substrate maintains proper flatness during processing.
2Adaptability or versatility
If the electrostatic chucks are made from different materials (metal and ceramic), then thermal and electrical properties are optimized, but manufacturing complexity increases
Solution Approach 1:
Different electrostatic chucks are made from different materials (metal or ceramic) based on their specific functional requirements. This local quality approach allows optimization of thermal and electrical properties for each chuck position while managing manufacturing complexity through standardized designs.
Solution Approach 2:
The system uses both metal and ceramic materials for different electrostatic chucks, leveraging the complementary properties of these materials. Metal chucks provide electrical conductivity and thermal mass, while ceramic chucks offer thermal insulation and chemical stability, creating a composite material strategy for overall system optimization.
3Manufacturing precision
If driving shafts are added to control chuck height, then flatness is improved, but device complexity increases
Solution Approach 1:
The height control function is segmented into individual driving shafts for each electrostatic chuck. This allows independent adjustment of each chuck's position, enabling precise flatness control while keeping each control element simple and modular, thus managing overall device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents sagging and maintains substrate flatness during processing, reducing the risk of defective products by compensating for height deviations and ensuring consistent flatness across the electrostatic chucks.
Implementation Method 1
a plurality of electrostatic chucks ESC which include a first surface S1 on which the plate PT is disposed and a second surface S2 on which a substrate SUB is supported
Data Source
AI summary
A deposition apparatus includes a plate; electrostatic chucks including a first surface on which the plate is disposed; and a second surface on which a substrate is supported; and a control device that controls a flatness between the electrostatic chucks, and each of the electrostatic chucks includes driving shafts disposed through an area of an edge of the first surface of each of the electrostatic chucks, and the control device controls the flatness between the electrostatic chucks through the driving shafts by measuring a height deviation between the electrostatic chucks.