Electrostatic Chuck Flexible Electrode Power Supply
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Solution Overview
Problem
Existing electrostatic chucks face issues with reliable electrical connection to the power supply unit due to deformation caused by cushioning properties, leading to conduction breakage and insufficient insulation, especially under vacuum conditions, which affects the accuracy and durability of work adsorption.
Innovation Solution
The electrostatic chuck design includes a flexible electrode layer with a power supply unit featuring a connection piece that extends from the electrode layer, bent along the side surface of the base plate, and an electrically conductive component mounted in a rear surface mounting hole, ensuring reliable electrical connection and insulation, even when the adsorbing surface has a cushion property.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a cushion layer is provided on the base plate to improve work adsorption accuracy, then the adhesion between the adsorbing surface and the work is improved, but stress acts on the connection part between the electrode and power supply unit, causing conduction breakage and insufficient insulation
Solution Approach 1:
The power supply unit is segmented into a rigid portion (electrically conductive component mounted on base plate) and a flexible portion (connection piece with wire). This segmentation allows the rigid part to maintain stable electrical connection while the flexible part absorbs deformation stress from cushion layer compression, preventing conduction breakage.
Solution Approach 2:
The connection piece is designed as a flexible component that can bend and deform. When the cushion layer compresses during work adsorption, the flexible connection piece absorbs the resulting stress through elastic deformation, preventing stress transmission to the electrical connection points and maintaining insulation integrity.
2Manufacturing precision
If the electrode layer is made flexible to accommodate cushioning deformation, then the adhesion between the adsorbing surface and the work is improved, but the electrical insulation becomes insufficient under vacuum conditions
Solution Approach 1:
The connection piece acts as an intermediary element between the flexible electrode layer and the rigid power supply unit. It transmits electrical connection while isolating the insulation requirement from the flexible portion, allowing the electrode layer to remain flexible for accurate work adsorption without compromising electrical insulation under vacuum.
Solution Approach 2:
The insulation function is extracted from the flexible electrode layer and assigned to the rigid power supply unit and connection piece. This separation allows the electrode layer to be optimized for flexibility and adsorption accuracy, while the insulation function is handled by components that maintain stable electrical properties even under vacuum conditions.
3Ease of operation
If through holes are provided for vacuum adsorption, then the work can be held by vacuum adsorption, but the holding force is reduced and electrostatic adsorption is required
Solution Approach 1:
The patent combines vacuum adsorption (through through holes) and electrostatic adsorption (through electrode layer) into a dual-mode holding system. The through holes enable vacuum adsorption to provide initial holding force, while the electrode layer provides additional electrostatic adsorption force, compensating for the reduced holding force from vacuum adsorption alone and ensuring reliable work retention.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration maintains reliable electrical connection and improves durability by preventing stress on the connection part between the electrode and power supply unit, ensuring accurate work adsorption and vacuum sealing without discharge, even when the adsorbing surface has a cushion property.
Implementation Method 1
the electrostatic chuck is formed of an electrode layer and a base plate made of a metal such as aluminum... electrodes are formed in a prescribed pattern of comb teeth form or the like... to perform an electrostatically adsorbing action
Implementation Method 2
a cushion layer formed of a silicone rubber is provided on a base plate... a cushioning property is imparted to the work adsorbing surface of the electrostatic chuck... the deformation of the work can be absorbed
Implementation Method 3
through holes penetrating through the electrode layer and the base plate along the direction of thickness thereof are provided... the work can be adsorbed and supported by vacuum adsorption
Data Source
AI summary
An electrostatic chuck includes a base plate, an electrode layer having flexibility, covering the surface of the base plate, and a power supply unit for electrically connecting the electrode layer to the power source side. The power supply unit includes a connection piece including a wire, and electrically conductive components to be used in connection to the power source side. The wire is connected to an electrode of the electrode layer, and extends from the side edge of the electrode layer. The electrically conductive component is electrically connected with the wire, and fixes the connection piece bent along the side surface of the base plate to the base plate.