Electrostatic Chuck Adsorption Force Measurement by Substrate Shifting

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Solution Overview

Problem

Existing methods for measuring the adsorption force of electrostatic chucks in substrate processing apparatuses suffer from poor reproducibility due to warpage and slippage of substrates during vertical drawing and removal processes, making it difficult to quantify the adsorption force accurately.

Innovation Solution

A measurement apparatus and method that measures the force required to shift a substrate on an electrostatic chuck without vertical drawing, using a configuration that includes a stage, substrate holding plate, and pressure sensors to calculate adsorption force based on torque and pressure measurements, ensuring reproducible results.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If vertical drawing and removal methods are used to measure adsorption force, then the measurement process is simple, but the reproducibility is poor due to substrate warpage and slippage

Engineering Contradiction:

Improvemeasurement process simplicityVSAvoidadsorption force measurement reproducibility

Core Design Contradiction:

Ease of operationVSMeasurement precision

Solution Approach 1:

Instead of vertically drawing the substrate upward to measure adsorption force (conventional method), the patent applies a horizontal shifting force to the substrate while it remains adsorbed on the electrostatic chuck. This inverted measurement approach eliminates warpage and slippage issues while maintaining operational simplicity.

Inventive Principle:

Principle #13The other way round (Inversion)

Solution Approach 2:

The patent replaces the vertical mechanical drawing method with a horizontal force application system using a cantilever beam and spring mechanism. This substitution allows measurement of the force required to shift the substrate horizontally, providing reproducible results without the drawbacks of vertical removal methods.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Device complexity

If substrate is vertically drawn for measurement, then the measurement setup is straightforward, but substrate warpage occurs reducing measurement accuracy

Engineering Contradiction:

Improvemeasurement setup complexityVSAvoidsubstrate flatness during measurement

Core Design Contradiction:

Device complexityVSManufacturing precision

Solution Approach 1:

The patent inverts the measurement direction from vertical to horizontal. By applying force horizontally to shift the substrate while it remains adsorbed, the substrate maintains its flat position on the electrostatic chuck, eliminating warpage while keeping the setup relatively simple.

Inventive Principle:

Principle #13The other way round (Inversion)

3Productivity

If substrate removal is used to measure adsorption, then the measurement process is direct, but substrate slippage occurs during measurement

Engineering Contradiction:

Improvemeasurement efficiencyVSAvoidmeasurement reproducibility

Core Design Contradiction:

ProductivityVSMeasurement precision

Solution Approach 1:

Instead of removing the substrate vertically to measure adsorption force, the patent measures the horizontal force required to shift the substrate while it remains adsorbed. This inverted approach eliminates slippage during measurement while maintaining measurement efficiency.

Inventive Principle:

Principle #13The other way round (Inversion)

Solution Approach 2:

The patent applies a preliminary horizontal force through the cantilever beam mechanism to gradually shift the substrate while it is still adsorbed. This preliminary action allows measurement of the exact force threshold for substrate movement without causing slippage or requiring complete removal.

Inventive Principle:

Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables quantitative measurement of adsorption force with high reproducibility, allowing for accurate determination of optimal application voltages and timely replacement of electrostatic chucks, and ensuring stable substrate holding in substrate processing apparatuses.

Implementation Method 1

a substrate adsorption unit that is able to adsorb the substrate

Methodology Applied

Scientific EffectElectrostatic adsorption: Electrostatics

Implementation Method 2

a measurement unit that is able to measure force needed to shift a substrate

Methodology Applied

Scientific EffectPressure measurement:

Data Source

PatentUS20260056114A1Measurement apparatus, measurement method, and calibration method

Publication Date: 2026.02.26 TOKYO ELECTRON LTD

AI summary

A measurement apparatus includes a measurement unit and a controller. The measurement unit is able to measure force needed to shift a substrate on a substrate adsorption unit that is able to adsorb the substrate, in an adsorbed state in which the substrate is adsorbed by the substrate adsorption unit. The controller calculates adsorption force of the substrate adsorption unit based on the force measured by the measurement unit.