Electrostatic Chuck Gap Control for OLED Transfer
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Solution Overview
Problem
Current methods for manufacturing organic light-emitting display apparatuses face challenges in precisely patterning and transferring layers due to variations in the gap between the display substrate and optical photomask, leading to inconsistent pattern formation and reduced resolution.
Innovation Solution
An electrostatic chuck system with a plurality of unit chucks, a gap measuring meter, and a control unit that adjusts the gap between the display substrate and optical photomask using variable resistance units, ensuring precise alignment and uniformity for accurate transfer layer formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional deposition process or print process is used to form the organic emission layer, then the manufacturing process is simple, but the resolution and pattern precision are insufficient
Solution Approach 1:
The patent replaces conventional mechanical deposition or printing methods with a laser-induced thermal imaging (LITI) process that uses optical fields and thermal effects to transfer patterns from a photomask to the substrate, achieving higher resolution and pattern precision
Solution Approach 2:
The patent changes the physical parameters of the processing system by controlling the gap distance between the photomask and substrate within a specific range (0.1-10 μm) and using laser irradiation with controlled intensity and duration to achieve precise thermal transfer and pattern formation
2Manufacturing precision
If the gap between the display substrate and optical photomask is not controlled, then the device structure is simple, but the pattern formation consistency and resolution are poor
Solution Approach 1:
The patent introduces a feedback control system that includes a gap measuring device to monitor the distance between the photomask and substrate in real-time, with a control unit that adjusts the gap based on measured values to maintain optimal spacing for consistent pattern transfer
Solution Approach 2:
The patent employs dynamic gap control where the spacing between the photomask and substrate can be adjusted during the manufacturing process to optimize pattern transfer quality, rather than using a fixed rigid structure
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the formation of minutely patterned transfer layers with high resolution and consistency, improving the manufacturing efficiency and quality of organic light-emitting display apparatuses.
Implementation Method 1
an electrostatic chuck which has a plurality of unit chucks and on which a display substrate is mounted
Implementation Method 2
a gap measuring meter for measuring a gap between the display substrate and the optical photomask
Implementation Method 3
a power source unit for applying power to each of the plurality of unit chucks through variable resistance units respectively connected to the plurality of unit chucks
Implementation Method 4
a light source mounted on the optical photomask; a gap measuring meter for measuring a gap between the display substrate and the optical photomask
Data Source
AI summary
An electrostatic chuck system includes an electrostatic chuck with a plurality of unit chucks supporting a display substrate, an optical photomask on the display substrate, the optical photomask having a material to be transferred onto the display substrate, a light source on the optical photomask, a gap measuring meter for measuring a gap between the display substrate and the optical photomask, a power source unit for applying power to each of the plurality of unit chucks through variable resistance units respectively connected to the plurality of unit chucks, and a control unit electrically connected to the gap measuring meter, the variable resistance units, and the power source unit, and transmits a signal for adjusting the gap.