Electrostatic Chuck Sealing Structure for Reactive Gas Blocking
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Solution Overview
Problem
In electrostatic chucks used for semiconductor and thin film manufacturing, the sealing member's elasticity causes it to stretch, leading to a gap between the sealing member and the ceramic puck, allowing reactive gases to penetrate and compromise the adhesion between the ceramic puck and the electrostatic chuck body, resulting in early failure.
Innovation Solution
An electrostatic chuck design with an inclined surface installation portion for the sealing member, which utilizes the material's elasticity to generate a restoring force, ensuring contact pressure and preventing gas penetration by adjusting the angle of inclination to maintain sealing effectiveness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the sealing member is stretched to fit the electrostatic chuck, then the sealing member can be installed, but the cross-sectional area is reduced and gaps occur between the sealing member and ceramic puck, allowing gas penetration
Solution Approach 1:
The sealing member is designed with a curved cross-section matching the concave shape of the installation groove, rather than a straight cross-section. This curvature allows the sealing member to fit the groove without excessive stretching, maintaining its cross-sectional area and sealing contact with the ceramic puck edge, thus preventing gas penetration while enabling installation
Solution Approach 2:
The sealing member's physical parameters are optimized by controlling its cross-sectional shape and dimensions to match the installation groove geometry. By changing the geometric parameters (curved cross-section with specific radius), the sealing member achieves proper fit without excessive deformation, maintaining both installability and sealing effectiveness
2Ease of operation
If the sealing member is stretched during installation, then it can be mounted on the electrostatic chuck, but the adhesive layer is exposed to reactive gases, compromising adhesion and leading to early failure
Solution Approach 1:
The curved cross-section of the sealing member allows it to be compressed into the installation groove without excessive stretching, maintaining sufficient cross-sectional area to seal against the ceramic puck edge. This prevents reactive gases from reaching the adhesive layer, preserving adhesion strength and preventing early failure while still enabling mounting
Solution Approach 2:
The sealing member is designed with pre-compression capability through its curved geometry, allowing it to be installed in a compressed state that provides immediate sealing protection to the adhesive layer before exposure to reactive gases, preventing gas penetration and adhesion compromise from the outset
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents or reduces the flow of process gases into the sealing member, enhancing the adhesion between the ceramic puck and the electrostatic chuck body, thereby extending the chuck's lifespan and maintaining process integrity.
Implementation Method 1
the sealing member includes a material having elasticity and is configured to generate a restoring force by tension when installed on the installation portion
Data Source
AI summary
An electrostatic chuck comprising; an electrostatic chuck body configured to have a step protruding from a lower end thereof in a radial direction, an adhesive layer on an upper surface of the electrostatic chuck body, a ceramic puck configured to be adhered to the adhesive layer and configured to have an edge protruding from the upper surface of the electrostatic chuck body, and a sealing member on a lower portion of an edge of the ceramic puck. The electrostatic chuck body is provided with an installation portion configured to have an inclined surface, and the sealing member is configured to be in contact with the inclined surface.