Electrostatic Chuck Groove Layout for Regional Gas Pressure Control
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Solution Overview
Problem
Existing electrostatic chucks face issues with particle deposition at sealing ring portions due to airtight partitioning, leading to defects, while effectively controlling gas pressure in each region is challenging without these rings.
Innovation Solution
The electrostatic chuck design eliminates conventional sealing rings and employs grooves and gas introduction holes arranged to maintain a shorter groove end portion-end portion distance and direct linkage with boundary grooves, allowing for effective gas pressure control without particle deposition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If sealing rings are provided to partition regions airtightly for gas pressure control, then gas pressure control in each region is improved, but particle deposition at sealing ring portions occurs leading to defects
Solution Approach 1:
The invention removes the sealing rings from the electrostatic chuck structure entirely. Instead of using sealing rings to partition regions, the patent uses the natural boundaries between dielectric regions to create separate gas flow paths. This extraction of the harmful sealing ring component eliminates particle deposition at sealing ring portions while maintaining the ability to control gas pressure in different regions through separate gas introduction holes and flow control mechanisms.
Solution Approach 2:
The invention segments the electrostatic chuck into multiple dielectric regions with different dielectric constants, where each region has its own gas introduction hole and flow control mechanism. This segmentation allows independent gas pressure control in each region without requiring sealing rings, as the dielectric regions themselves act as natural partitions. The gas flow paths are divided accordingly, enabling precise temperature and pressure control in each region while avoiding particle deposition issues.
2Adaptability or versatility
If sealing rings are used to control gas pressure in each region, then regional pressure control is achieved, but device complexity increases due to additional components
Solution Approach 1:
The dielectric regions serve multiple functions: they provide electrical insulation, create natural regional partitions for gas flow control, and enable independent pressure control through their inherent boundaries. This multi-functionality eliminates the need for separate sealing ring components, reducing device complexity while maintaining the capability for regional pressure control. The gas introduction holes and flow control mechanisms work in conjunction with the dielectric region boundaries to achieve versatile pressure control.
3Reliability
If sealing rings are provided for airtight partitioning, then gas pressure control is effective, but particle collection at sealing ring portions occurs
Solution Approach 1:
The invention converts the potential harm of particle deposition into a benefit by eliminating the sealing rings that cause particle collection. Instead of trying to manage particles around sealing rings, the design uses the dielectric region boundaries themselves to define gas flow paths, ensuring that gas flows smoothly through designated channels without encountering sealing ring surfaces where particles could accumulate. This approach maintains reliable gas pressure control while preventing particle collection issues.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively controls gas pressure in each region, reducing particle deposition and maintaining target pressures, thus enhancing gas controllability and preventing defects.
Implementation Method 1
An electrostatic force is generated when electrical power is applied to the electrode. The electrostatic chuck attracts and holds an object such as a silicon wafer or the like by the generated electrostatic force.
Implementation Method 2
the temperature of the object is controlled by causing an inert gas (hereinbelow, called simply the gas) such as helium (He) or the like to flow between the front surface of the ceramic dielectric substrate and the back surface of the object
Data Source
AI summary
An electrostatic chuck includes a base plate and a ceramic dielectric substrate. The ceramic dielectric substrate has a first major surface. The first major surface includes at least a first region and a second region. At least one first gas introduction hole connected to at least one of multiple first grooves. The first grooves include a first boundary groove, and at least one first in-region groove. Multiple second grooves and at least one second gas introduction hole are provided in the second region. The second grooves are include a second boundary groove extending along the first boundary and are provided to be most proximal to the first boundary. A groove end portion-end portion distance between the first boundary groove and the second boundary groove is smaller than a groove end portion-end portion distance between the first boundary groove and the first in-region groove.