Electrostatic Chuck Ground Electrode for Easier Substrate Release
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Solution Overview
Problem
In substrate fixing devices with electrostatic chucks, residual electric charges on the adsorption surface can hinder the detachment of substrates despite the voltage being stopped.
Innovation Solution
The electrostatic chuck incorporates a ground electrode and wiring connected to the ground electrode, which extends to the adsorption surface, allowing residual electric charges to be dissipated to the ground, facilitating substrate detachment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Force
If voltage is applied to the adsorption electrode, then the substrate is firmly adsorbed on the electrostatic chuck, but residual electric charges remain on the adsorption surface after voltage is stopped, hindering substrate detachment
Solution Approach 1:
A ground electrode is introduced as an intermediary component between the adsorption electrode and the substrate. This ground electrode provides a dedicated pathway for residual electric charges to dissipate to ground potential, mediating the charge discharge process without interfering with the primary adsorption function. The wiring extending to the adsorption surface acts as the connection conduit for this intermediary charge dissipation system.
2Ease of operation
If a ground electrode and wiring are added to dissipate residual charges, then substrate detachment is facilitated, but the device structure becomes more complex
Solution Approach 1:
The ground electrode structure is designed to serve multiple functions: it provides a ground connection for charge dissipation, maintains the ceramic plate's mechanical integrity, and works in conjunction with the adsorption electrode system. The wiring that extends to the adsorption surface serves dual purposes by both connecting the ground electrode and providing a pathway for charge dissipation, thereby reducing the need for separate dedicated components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively reduces the adsorption force between the substrate and the adsorption surface, making it easier to detach the substrate, while also simplifying the manufacturing process.
Implementation Method 1
The ground electrode is arranged in the ceramic plate between the other surface of the ceramic plate and the adsorption electrode, and can be connected to a ground potential. The wiring is connected to the ground electrode in the ceramic plate and extends to the one surface of the ceramic plate.
Data Source
AI summary
An electrostatic chuck includes a ceramic plate, an adsorption electrode, a ground electrode, and a wiring. The adsorption electrode is built-in near one surface of the ceramic plate. The ground electrode is arranged in the ceramic plate between the other surface of the ceramic plate and the adsorption electrode, and can be connected to a ground potential. The wiring is connected to the ground electrode in the ceramic plate and extends to the one surface of the ceramic plate.