Electrostatic Chuck Heater Sequencing for Lower Power Capacity
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Solution Overview
Problem
The increase in the number of heaters for temperature control in a plasma processing apparatus leads to a corresponding increase in the electric power capacity required by the power source, which is inefficient and potentially limits the system's performance.
Innovation Solution
A plasma processing apparatus with a substrate supporting unit that includes a first and second heater electrode layer group, where DC current is periodically and sequentially supplied to these groups, allowing for time division of power supply to individual heaters, reducing the overall electric current demand and maintaining effective temperature control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the number of heaters is increased to improve temperature control precision in each zone, then temperature control precision is improved, but electric power capacity requirement increases
Solution Approach 1:
The patent applies periodic action by sequentially supplying power to different heater groups in time-divided intervals. The controller alternates between first and second heater electrode layer groups, activating one group while the other is deactivated. This periodic switching enables precise temperature control across multiple zones without requiring all heaters to operate simultaneously, thereby reducing the peak power capacity requirement while maintaining temperature precision.
Solution Approach 2:
The patent segments the heater system into multiple independent groups (first heater electrode layer group and second heater electrode layer group) that can be controlled separately. Each group corresponds to different spatial zones on the substrate support surface. This segmentation allows selective activation of heater groups based on temperature requirements of different zones, enabling precise local temperature control without increasing overall power capacity.
2Adaptability or versatility
If the number of heaters is increased to maintain temperature control for more zones, then temperature control coverage is improved, but device complexity increases
Solution Approach 1:
The patent merges multiple heater groups into a unified power supply system that shares common power supply lines. Instead of providing separate power supplies for each heater or heater zone, the system uses shared power supply lines with sequential switching control. This merging approach extends temperature control coverage to multiple zones while reducing device complexity by eliminating redundant power supply components.
Solution Approach 2:
The power supply system achieves multi-functionality by using the same power supply lines and control mechanism to serve multiple heater groups across different zones. The controller universally manages power distribution to various heater groups through time-division multiplexing, enabling a single power supply system to provide temperature control coverage for the entire substrate support surface without requiring dedicated power supplies for each zone.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces the electric power capacity needed by the power source while maintaining precise temperature control for each zone, minimizing the size and complexity of the power supply system, and ensuring efficient operation.
Implementation Method 1
a controller configured to periodically and sequentially supply DC current from the power source to heater electrode layers included in the first heater electrode layer group and heater electrode layers included in the second heater electrode layer group
Data Source
AI summary
A base disposed in a plasma processing chamber. An electrostatic chuck disposed on an upper portion of the base, the electrostatic chuck including a first part and a second part. A first heater electrode layer group including at least one heater electrode layer disposed in the first part. A second heater electrode layer group including at least one heater electrode layer disposed in the second part. A power source is electrically connected to the first heater electrode layer group and the second heater electrode layer group. A controller configured to periodically and sequentially supply DC current from the power source to heater electrode layers included in the first heater electrode layer group and heater electrode layers included in the second heater electrode layer group.