Electrostatic Chuck Heating Circuit to Reduce Base Plate Through Holes
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Solution Overview
Problem
The existing substrate fixing devices with multiple heating elements in electrostatic chucks require a large number of electric wires for control, leading to an increase in the number of through holes in the base plate, which reduces the design flexibility and increases assembly complexity.
Innovation Solution
The electrostatic chuck incorporates a base body with integrated heating elements, current control elements, and a control circuit, where each heating element is connected in series with a current control element, and a control circuit controls the current control elements to manage heat generation, reducing the need for multiple electric wires and through holes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a large number of heating elements are provided in the electrostatic chuck to improve temperature adjustment accuracy, then temperature control precision is improved, but the number of electric wires and through holes increases, reducing design freedom of the base plate
Solution Approach 1:
The patent combines multiple independent control circuits into a single integrated control circuit that controls multiple current control elements. This merging approach maintains the ability to independently control multiple heating elements while reducing the number of external wire connections required, thus preserving base plate design freedom while achieving precise temperature control.
Solution Approach 2:
The control circuit is designed with multi-functionality to control multiple heating elements through a single interface. The control circuit can independently regulate current to each heating element via current control elements while being accessible through a single wire connection, making the system both precise and design-friendly.
2Temperature
If multiple heating elements with independent control are provided to improve temperature distribution, then temperature uniformity is improved, but the number of electric wires led out to the outside increases
Solution Approach 1:
Multiple control functions are merged into a single control circuit that interfaces with the external system through one wire. This control circuit internally manages multiple current control elements, each regulating a heating element, thereby achieving temperature uniformity without increasing external wire complexity.
3Ease of operation
If multiple through holes are formed in the base plate to lead out electric wires, then control of multiple heating elements is enabled, but the area occupied by through holes increases and assembly complexity increases
Solution Approach 1:
The patent merges multiple wire routing paths into a single access point. The control circuit provides a unified interface that connects to external control systems through one wire, eliminating the need for multiple through holes and associated assembly steps, while still enabling independent control of multiple heating elements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration minimizes the number of through holes in the base plate, enhancing design flexibility, reducing assembly complexity, and improving the reliability of connections while maintaining precise temperature control across multiple heating zones.
Implementation Method 1
an electrostatic electrode that is provided in the base body
Implementation Method 2
a plurality of heating elements that are provided in the base body
Data Source
AI summary
An electrostatic chuck is configured to adsorb and retain an object thereon. The electrostatic chuck includes: a base body on which the object is mounted; an electrostatic electrode that is provided in the base body; a plurality of heating elements that are provided in the base body; a plurality of current control elements that are provided in the base body, and each of which is connected in series with a corresponding one of the heating elements; and a control circuit that is provided in the base body, and that is connected to the current control elements and configured to control operations of the current control elements.