Electrostatic Chuck Honeycomb Base Member
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Solution Overview
Problem
Conventional electrostatic holding devices for large-size glass substrates are heavy, leading to base member distortion and poor flatness, causing glass substrates to fall during processing, resulting in contamination, productivity loss, and uneven deposition.
Innovation Solution
An electrostatic chuck with a lightweight and strong base member featuring a multicellular structure of tightly arranged polygonal or circular tubular bodies, supported by shafts at both edges, and an electrostatic holding layer with a dielectric and holding electrode, allowing for effective electrostatic holding and cooling of the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If a solid heavy base member is used to ensure strength, then the strength is improved, but the weight increases causing base member distortion and poor flatness
Solution Approach 1:
The base member is segmented into a lattice structure consisting of multiple beam elements arranged in a grid pattern, replacing the solid heavy base member. This segmentation reduces the overall weight while maintaining structural strength through the distributed framework, preventing base member distortion and poor flatness during substrate processing.
Solution Approach 2:
The base member is designed with a lattice structure that creates a porous or open framework rather than a solid continuous material. This lattice configuration reduces weight by removing unnecessary material while the interconnected beam elements maintain the required mechanical strength and rigidity to support the substrate without distortion.
2Speed
If the base member weight is reduced, then the processing speed is improved, but the strength may be insufficient to maintain flatness
Solution Approach 1:
The lattice structure segments the base member into multiple lightweight beam elements that can be rapidly accelerated and decelerated, improving processing speed. The segmented design reduces rotational inertia and mass, allowing faster substrate conveyance while the interconnected structure maintains sufficient strength through geometric rigidity.
Solution Approach 2:
The base member employs a composite lattice structure combining multiple beam elements that may use different materials or cross-sectional configurations optimized for specific mechanical properties. This composite approach achieves an optimal balance between reduced weight for high-speed operation and maintained strength through the synergistic arrangement of structural elements.
3Manufacturing precision
If the base member flatness is poor, then the substrate may fall off or deposition becomes uneven, but improving flatness requires heavier base members
Solution Approach 1:
The lattice structure segments the base member into multiple adjustable beam elements that can be independently positioned to maintain precise flatness. This segmentation allows for active flatness control and adjustment without requiring a heavy solid structure, preventing substrate fall-off and ensuring uniform deposition across the substrate surface.
Solution Approach 2:
The base member design allows for parameter changes in the lattice configuration, such as beam thickness, spacing, and material properties, to optimize the balance between weight and flatness maintenance. By adjusting these parameters, the structure achieves sufficient rigidity to maintain substrate flatness for precise deposition while keeping the overall weight reduced for efficient processing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution prevents substrate fall-off, maintains flatness, reduces contamination, and enhances processing speed and quality by minimizing base member distortion and ensuring accurate deposition.
Implementation Method 1
an electrostatic holding layer formed by thermal spraying or the like is provided on a solid heavy base member
Implementation Method 2
an electrostatic holding layer including a dielectric and a holding electrode, the dielectric having a surface serving as a holding surface
Data Source
AI summary
An electrostatic chuck that enables high speed and high quality processing of a plate to be processed, and in which the weight of a base member is reduced and the strength thereof increased so as to maintain the flatness of the base member and prevent the plate to be processed from falling; a glass substrate processing method; and said glass substrate. An electrostatic chuck (1) provided with a base member (2) and an electrostatic suction layer (3). The base member (2) is formed by a lower-surface plate (20), side-surface plates (21-24), and an upper-surface plate (25), and has a part (4) for a plurality of individual structures configured therein. The part (4) for a plurality of individual structures has a honeycomb structure that is caused by regular hexagonal tubes (40) and enables the weight of the base member (2) to be reduced and the strength thereof increased.