Electrostatic Chuck Holding with Ionic Liquid Scratch Prevention
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing substrate processing methods using electrostatic chucks can cause scratches on the substrate surface due to direct contact during movement, leading to flatness issues and out-of-focus problems in subsequent exposure processes.
Innovation Solution
A substrate processing apparatus that uses an ionic liquid as a cushion material between the substrate and the electrostatic chuck, allowing for electrostatic adsorption while preventing direct contact and maintaining substrate stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If direct contact between substrate and electrostatic chuck is used, then substrate holding stability is improved, but substrate surface scratch occurs
Solution Approach 1:
An ionic liquid layer is introduced as an intermediary substance between the substrate and the electrostatic chuck. This liquid layer prevents direct contact while maintaining electrostatic adsorption, thereby preventing substrate surface scratches while preserving holding stability.
Solution Approach 2:
The patent utilizes a liquid (ionic liquid) instead of solid contact for substrate holding. The liquid layer provides a non-contact interface that maintains adsorption forces while eliminating mechanical scratching, applying hydraulic principles to achieve damage-free substrate support.
2Object-affected harmful factors
If ionic liquid is supplied on placing surface, then substrate scratch prevention is improved, but electrostatic adsorption capability may deteriorate
Solution Approach 1:
The patent changes the physical and chemical parameters of the liquid layer by using ionic liquids with specific properties (high ionic conductivity, appropriate viscosity, and electrostatic characteristics). These parameter optimizations ensure that the liquid layer maintains electrostatic adsorption capability while providing scratch prevention.
Solution Approach 2:
The system creates a composite interface combining the ionic liquid layer with the electrostatic chuck surface. This composite structure leverages the electrostatic properties of the ionic liquid while maintaining the mechanical support function of the chuck, achieving both scratch prevention and adsorption capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents scratches on the substrate surface and maintains substrate flatness by using an ionic liquid film, ensuring stable adsorption and temperature control during processing.
Implementation Method 1
an electrostatic chuck that is provided in the chamber, includes a placing surface for placing a substrate, and is able to electrostatically adsorb the substrate placed on the placing surface
Implementation Method 2
A substrate processing apparatus that uses an ionic liquid as a cushion material between the substrate and the electrostatic chuck, allowing for electrostatic adsorption while preventing direct contact
Data Source
AI summary
An electrostatic chuck is provided in a chamber, includes a placing surface for placing a substrate, and is able to electrostatically adsorb the substrate placed on the placing surface. An ionic liquid supply unit is able to supply an ionic liquid on the placing surface of the electrostatic chuck.