Electrostatic Chuck Moisture Removal via Lamp Heating
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Solution Overview
Problem
Moisture in the processing vessel can reduce the suction force of an electrostatic chuck and potentially cause electric discharges during the cooling of electronic devices, necessitating effective moisture removal from the mounting surface.
Innovation Solution
A cooling processing apparatus equipped with an electrostatic chuck and a lamp heating device that decompresses the processing vessel and uses the lamp heating device to remove moisture from the mounting surface of the electrostatic chuck, followed by cooling using a cooling mechanism.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If the processing vessel is cooled to cool the electrostatic chuck, then the cooling efficiency is improved, but moisture condenses on the mounting surface reducing suction force
Solution Approach 1:
The lamp heating device performs preliminary heating of the mounting surface before cooling begins, or operates concurrently during cooling to prevent moisture condensation. This preliminary action ensures the surface temperature remains above the dew point even when the bulk electrostatic chuck is cooled, thereby maintaining suction force throughout the cooling process.
Solution Approach 2:
Heating is applied locally only to the mounting surface where moisture condensation occurs, rather than heating the entire electrostatic chuck. The lamp heating device targets specifically the area in contact with the processed material, allowing the bulk of the electrostatic chuck to be cooled while the mounting surface remains moisture-free, thus maintaining both cooling efficiency and suction force.
2Reliability
If the lamp heating device operates during decompression, then moisture removal is improved, but energy consumption increases
Solution Approach 1:
The lamp heating device operates continuously during the decompression phase to consistently prevent moisture condensation on the mounting surface. By maintaining continuous heating throughout the decompression process, the system ensures complete moisture removal without interruption, which is more energy-efficient than intermittent heating that would require repeated heating cycles.
Solution Approach 2:
The lamp heating device activates before or during the early stages of decompression to prevent moisture condensation before it occurs. This preliminary heating action removes moisture proactively during the decompression process itself, rather than requiring additional separate drying steps after decompression is complete, thereby optimizing energy usage.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively prevents the reduction of suction force and discharge occurrences by efficiently removing moisture from the electrostatic chuck's mounting surface, ensuring reliable cooling processes.
Implementation Method 1
heating the mounting surface of the electrostatic chuck by using the lamp heating device
Implementation Method 2
a flow channel through which a coolant flows is formed in the base. As coolant flows through the flow channel, the electrostatic chuck is cooled
Implementation Method 3
If a voltage is applied to the suction electrodes of the electrostatic chuck, an electrostatic force is generated, and an object to be processed is sucked to the electrostatic chuck by the electrostatic force
Data Source
AI summary
A cooling processing apparatus includes: a processing vessel; an electrostatic chuck installed in the processing vessel, the electrostatic chuck having a mounting surface on which an object to be processed is mounted; a cooling mechanism configured to cool the electrostatic chuck; and a lamp heating device configured to remove moisture attached to the mounting surface. Further, a method for operating the cooling processing apparatus includes: decompressing the space in the processing vessel by using the exhaust device; removing the moisture attached to the mounting surface of the electrostatic chuck by using the lamp heating device; and cooling the electrostatic chuck by using the cooling mechanism after the removal of the moisture performed by the lamp heating device is terminated.