Electrostatic Chuck Leak Localization Using Visible Tracking Fluid
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Solution Overview
Problem
Existing methods for testing helium leakage in electrostatic chucks are unable to accurately identify the specific area of leakage, making it difficult to determine which parts of the chuck are problematic.
Innovation Solution
A method and equipment using a tracking fluid with visibility, such as a pigment or fluorescent material, is supplied to the electrostatic chuck's flow path, and photographed using high-speed or thermal imaging cameras to identify leakage areas.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If pressure change detection method is used to detect helium leakage, then leakage detection capability is provided, but the ability to determine specific leakage location is lost
Solution Approach 1:
The patent introduces a tracking fluid as an intermediary substance that mixes with the helium gas flow. This tracking fluid contains visible particles or fluorescent materials that allow the leakage location to be visually tracked and identified, thereby recovering the location information that was lost when using only pressure change detection
Solution Approach 2:
The tracking fluid incorporates visible particles, dyes, or fluorescent materials that change the visual appearance of the gas flow. When the tracking fluid leaks along with the helium gas, the color or fluorescence change makes the leakage location observable and detectable, solving the problem of无法确定泄漏位置
2Reliability
If conventional pressure sensing method is used, then leakage occurrence can be detected, but measurement precision of leakage location is insufficient
Solution Approach 1:
The tracking fluid serves as a mediator that carries location information through visual or fluorescent signals. By tracking the position where the tracking fluid exits or accumulates, the precise leakage location can be determined with high measurement precision, overcoming the limitations of conventional pressure sensing methods
Solution Approach 2:
The visible particles, dyes, or fluorescent materials in the tracking fluid provide high-contrast visual signals that enable precise location identification. The color or fluorescence change allows for accurate determination of leakage position, significantly improving measurement precision compared to pressure sensing alone
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise determination of leakage areas, allowing for targeted repattern, cleaning, and disposal of the electrostatic chuck.
Implementation Method 1
a tracking fluid with visibility, such as a pigment or fluorescent material
Implementation Method 2
a tracking fluid with visibility, such as a pigment or fluorescent material
Implementation Method 3
photographed using high-speed or thermal imaging cameras
Implementation Method 4
photographed using high-speed or thermal imaging cameras
Data Source
AI summary
The present invention provides a method for leakage testing of an electrostatic chuck. The method for leakage testing of an electrostatic chuck comprises: a mounting step of mounting the electrostatic chuck on a test stage of a testing chamber; a loading step of loading a dummy substrate in an upper surface of the electrostatic chuck; a decompression step of decompressing an interior of the testing chamber; a tracking fluid supply step of supplying a tracking fluid with visibility to a flow path of the electrostatic chuck; a photographing step of photographing the electrostatic chuck; and a determination step of determining whether a leakage occurs in the flow path by examining an image photographed in the photographing step.