Electrostatic Chuck and Magnet Plate Layout for Mask Adherence
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Solution Overview
Problem
Existing deposition apparatuses face challenges in achieving reliable operation, particularly in maintaining close adherence between the base substrate and the mask, which is crucial for high-resolution display device manufacturing.
Innovation Solution
The deposition apparatus incorporates an electrostatic chuck with independently controlled electrode areas and a plate with magnet units arranged in specific patterns to enhance the magnetic flux density, ensuring improved adherence between the base substrate and the mask.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the deposition apparatus uses a conventional electrostatic chuck without differentiated electrode areas, then the structure is simpler, but the adherence between base substrate and mask is insufficient
Solution Approach 1:
The electrostatic chuck is divided into multiple electrode areas (first electrode area and second electrode area) with different voltages applied to different regions. This segmentation allows differential control of electrostatic forces across the substrate surface, improving adherence reliability without requiring complete structural redesign.
Solution Approach 2:
Different voltage levels are applied to different electrode areas based on local requirements. The first electrode area receives a first voltage while the second electrode area receives a second voltage, creating localized electrostatic fields that optimize adherence in specific regions where it is most needed.
2Force
If magnet units are arranged with small spacing to increase magnetic flux density, then the magnetic force is stronger, but the manufacturing precision of the plate decreases
Solution Approach 1:
The plate structure incorporates different magnet unit spacing in different regions: first magnet units with smaller spacing in areas requiring stronger magnetic force, and second magnet units with larger spacing in areas where manufacturing precision is prioritized. This local differentiation optimizes both magnetic force and manufacturability.
Solution Approach 2:
The plate is segmented into multiple magnet unit groups with different spacing configurations. This allows the system to achieve strong overall magnetic force while maintaining manufacturing feasibility through standardized spacing modules that are easier to manufacture at larger dimensions.
3Ease of manufacture
If the deposition apparatus uses uniform magnet unit spacing, then the manufacturing is easier, but the magnetic flux density distribution is non-optimal
Solution Approach 1:
Different regions of the plate use different magnet unit spacing configurations tailored to local magnetic flux requirements. Areas requiring higher flux density use smaller spacing, while other areas use larger spacing, optimizing overall magnetic performance without requiring complete uniformity throughout.
Solution Approach 2:
The magnet unit spacing is dynamically optimized for different functional zones of the plate. The system transitions from uniform spacing to differentiated spacing, allowing each region to have the optimal spacing for its specific magnetic requirements while maintaining overall manufacturing feasibility.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration improves the reliability of the deposition process by maintaining stable and close contact between the substrate and the mask, reducing warpage and enhancing the yield of high-resolution display devices.
Implementation Method 1
an electrostatic chuck on the base substrate
Implementation Method 2
first magnet units are arranged and a second area in which second magnet units are arranged
Data Source
AI summary
A deposition apparatus including: a base substrate; an electrostatic chuck on the base substrate; and a plate on the electrostatic chuck. The plate has a first area in which first magnet units are arranged and a second area in which second magnet units are arranged. The first magnet units are spaced apart from each other at a first distance, and the second magnet units are spaced apart from each other at a second distance. The second distance is greater than the first distance.