Electrostatic Chuck and Mask Frame Layout for Display Alignment
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Solution Overview
Problem
Existing manufacturing processes for display apparatuses, such as organic light-emitting displays, suffer from high process loss and yield issues due to inadequate substrate attachment and alignment during the deposition of materials.
Innovation Solution
An apparatus is designed with an electrostatic chuck and a mask frame configuration that allows for independent driving of the electrostatic chuck and a first plate, ensuring precise alignment and increased adhesive force, while the mask frame is partially spaced from the electrostatic chuck to prevent overlap and enhance substrate attachment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Force
If the mask frame is positioned to closely attach to the electrostatic chuck, then the substrate attachment force is improved, but the alignment precision deteriorates due to overlap interference
Solution Approach 1:
The mask frame is divided into a first portion and a second portion, with the first portion positioned away from the electrostatic chuck and the second portion positioned close to it. This segmentation allows different regions of the mask frame to serve different functions: the first portion avoids interference with the electrostatic chuck for precise alignment, while the second portion provides close attachment for strong substrate adhesion.
2Device complexity
If the electrostatic chuck and first plate are driven together, then the operational complexity is reduced, but the alignment precision deteriorates due to inability to independently adjust positions
Solution Approach 1:
The electrostatic chuck and the first plate are designed to be independently drivable, allowing dynamic adjustment of their relative positions. The electrostatic chuck can be positioned precisely relative to the mask frame, while the first plate can be independently positioned relative to the substrate, enabling precise alignment without mechanical coupling constraints.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces process loss and increases yield by improving substrate adherence and alignment, minimizing defects like shadowing and icicle formation, thereby enhancing the manufacturing efficiency of display apparatuses.
Implementation Method 1
An electrostatic chuck is configured to attach the substrate to the at least one mask
Data Source
AI summary
An apparatus for manufacturing a display apparatus includes a substrate. A mask assembly includes an opening, a mask frame surrounding the opening, and at least one mask coupled to the mask frame. An electrostatic chuck is configured to attach the substrate to the at least one mask. A first driver is configured to drive the electrostatic chuck. At least a partial portion of the mask frame does not overlap the electrostatic chuck in a thickness direction of the substrate.