Electrostatic Chuck Monopolar Bipolar Switching

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Solution Overview

Problem

Existing electrostatic chucks are limited to specific substrate types and are ineffective or incompatible with others, as they are either bipolar or monopolar, making it challenging to chuck packaging substrates with unique properties that require either monopolar or bipolar chucking methods.

Innovation Solution

An electrostatic chuck with independently reversible power supplies, allowing operation as both monopolar and bipolar by controlling the polarity and voltage of two electrodes, and a center-tap feedback system to maintain equal chucking force, enabling the handling of both monopolar and bipolar materials without physical modifications.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If existing electrostatic chucks are designed as either bipolar or monopolar configurations, then they can effectively chuck substrates of that specific type, but they become ineffective or incompatible with other substrate types requiring different polarity configurations

Engineering Contradiction:

Improvechucking effectivenessVSAvoidsubstrate type compatibility

Core Design Contradiction:

ReliabilityVSAdaptability or versatility

Solution Approach 1:

The electrostatic chuck employs dynamically controllable power supplies that can switch between monopolar and bipolar configurations. The first and second power supplies can independently adjust their output polarity and voltage levels, allowing the chuck to adapt its electrical configuration in real-time to match different substrate requirements without physical modification.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The system changes the electrical parameters (polarity and voltage) of the power supplies to accommodate different substrate types. By controlling the polarity of the first and second power supplies and adjusting their voltage levels, the chuck can transition between monopolar and bipolar modes to effectively handle various substrate materials with different electrical properties.

Inventive Principle:

Principle #35Parameter changes

2Reliability

If separate electrostatic chucks are used for monopolar and bipolar substrates, then each substrate type can be processed with optimized performance, but device complexity and the number of required components increase

Engineering Contradiction:

Improvesubstrate processing performanceVSAvoidnumber of electrostatic chuck units

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The electrostatic chuck is designed as a universal platform that can process both monopolar and bipolar substrates using the same physical device. The first and second electrodes, along with their independently controllable power supplies, enable the single chuck to perform multiple functions by switching between different polarity configurations, eliminating the need for separate specialized chucks.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent combines the functionality of separate monopolar and bipolar electrostatic chucks into a single unified device. By integrating two electrodes with independently controllable power supplies that can operate in different polarity modes, the system merges what would traditionally require two separate devices into one multi-functional unit.

Inventive Principle:

Principle #5Merging (Combining)

3Adaptability or versatility

If physical modifications are made to electrostatic chucks to accommodate different substrate types, then substrate compatibility can be improved, but manufacturing complexity and maintenance requirements increase

Engineering Contradiction:

Improvesubstrate material compatibilityVSAvoidchuck manufacturing simplicity

Core Design Contradiction:

Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

Instead of creating multiple physical variants of the electrostatic chuck, the invention uses dynamic control of electrical parameters to achieve adaptability. The same physical chuck structure with controllable power supplies can be reconfigured software-controlled to handle different substrate types, avoiding the need for manufacturing multiple hardware variants.

Inventive Principle:

Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the electrostatic chuck to efficiently chuck and dechuck substrates of varying materials by switching between monopolar and bipolar configurations, accommodating different substrate properties without requiring changes to the chuck, thus expanding compatibility and operational flexibility.

Implementation Method 1

electrostatic chuck comprising a first electrode powered by a first power supply with a first power, a second electrode powered by a second power supply with a second power

Methodology Applied

Scientific EffectElectrostatic force: Electrostatics

Data Source

PatentUS11476097B2Common electrostatic chuck for differing substrates

Publication Date: 2022.10.18 APPLIED MATERIALS INC

AI summary

An apparatus, methods and controllers for electrostatically chucking varied substrate materials are disclosed. Some embodiments of the disclosure provide electrostatic chucks with variable polarity and/or voltage. Some embodiments of the disclosure provide electrostatic chucks able to operate as monopolar and bipolar electrostatic chucks. Some embodiments of the disclosure provide bipolar electrostatic chucks able to compensate for substrate bias and produce approximately equal chucking force at different electrodes.