Electrostatic Chuck Mounting Portion Segmentation for Plasma Erosion
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Solution Overview
Problem
The existing substrate temperature control fixing apparatuses with electrostatic chucks face issues due to the low plasma resistance of silicon adhesives, leading to erosion and degradation, which results in reduced thermal conductivity and increased maintenance costs.
Innovation Solution
An electrostatic chuck with a base made of dielectric materials like ceramics and a detachable mounting portion made of dielectric materials, which can be easily replaced when degraded, along with an adhesive layer that provides flexibility and thermal conductivity, and a base plate for temperature control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If silicon adhesive is used to secure the base and base plate, then the base can be firmly fixed on the base plate, but the adhesive layer has low plasma resistance and gets corroded by plasma
Solution Approach 1:
The invention divides the electrostatic chuck into separable components: a base that remains fixed and a mounting portion that can be detached and replaced. The mounting portion is secured by the adhesive layer, while the base is protected from plasma exposure. This segmentation allows the adhesive to perform its fixing function without being directly exposed to plasma, thereby maintaining both fixing strength and plasma resistance.
Solution Approach 2:
The invention introduces an intermediary structure (the mounting portion) between the adhesive layer and the plasma environment. The mounting portion acts as a protective barrier that shields the adhesive from plasma corrosion while still allowing the adhesive to fulfill its function of securing the mounting portion to the base. This intermediary approach resolves the contradiction by protecting the vulnerable adhesive component.
2Device complexity
If the adhesive layer is exposed to plasma, then the electrostatic chuck can be simplified in structure, but the adhesive layer is corroded and thermal conductivity degrades
Solution Approach 1:
By segmenting the electrostatic chuck into a base and a detachable mounting portion, the invention creates a structured protection system. The mounting portion is designed to be replaceable, allowing periodic replacement before thermal conductivity degradation affects performance. This segmentation maintains relatively simple structure while protecting the adhesive layer from plasma exposure.
Solution Approach 2:
The invention implements preliminary protection by designing the mounting portion to be replaceable before degradation occurs. The gas outlet structure is designed in advance to facilitate easy replacement of the mounting portion, allowing maintenance to be performed before thermal conductivity degrades significantly. This preliminary action prevents the worsening of thermal conductivity rather than addressing it after damage occurs.
3Ease of repair
If the mounting portion is made detachable for easy replacement, then maintainability is improved, but the device complexity increases
Solution Approach 1:
The invention applies segmentation by creating a detachable mounting portion that can be easily separated from the base. The gas outlet structure is designed to facilitate this detachment, allowing the mounting portion to be removed and replaced without complex disassembly procedures. This segmentation improves maintainability while keeping the overall structural complexity manageable through clear functional separation.
Solution Approach 2:
The invention extracts the mounting portion as a separate, replaceable component from the base structure. This extraction allows the mounting portion to be independently replaced when degraded, improving ease of repair. The gas outlet design supports this extraction by providing clear separation interfaces and access pathways, enabling maintenance personnel to remove and replace the mounting portion without affecting the base structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances maintainability by allowing easy replacement of the mounting portion, maintaining thermal conductivity, and reducing maintenance costs while preventing plasma-induced erosion.
Implementation Method 1
the electrostatic electrodes 103 attracts and holds an object (not shown) such as a substrate on upper surfaces of the outer peripheral sealing ring 102b and the large number of projection portions 102c
Implementation Method 2
The heating elements (not shown) generate a heat when the voltage is applied thereto, and heats the base 102 via the adhesive layer 105
Implementation Method 3
The cooling water is circulated to cool the base plate 106 and thus cool the base 102 via the adhesive layer 105
Data Source
AI summary
There is provided an apparatus including: an electrostatic chuck for holding an object; and a base plate which supports the electrostatic chuck and controls a temperature of the electrostatic chuck. The electrostatic chuck is fixed onto the base plate via an adhesive layer. The electrostatic chuck includes: a base; an electrostatic electrode built in the base; and a mounting portion containing a dielectric material and detachably mounted on the base. The object is mounted on the mounting portion.