Electrostatic Chuck Insulation via Nested Tubular Design
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Solution Overview
Problem
Existing electrostatic chucks face issues with insufficient insulation between the power supply terminal and the base, leading to discharges, especially when the adhesive layer is incomplete or has voids, affecting the reliability and durability of the chuck.
Innovation Solution
The electrostatic chuck design incorporates a recess in the attraction plate with a tubular insulator and an adhesive layer that surrounds the power supply terminal, providing additional insulation and preventing discharges by increasing the thickness of the insulating structure between the terminal and the base.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If only an adhesive layer is used to insulate the power supply terminal from the base, then the structure is simple, but the insulation reliability is insufficient leading to discharges
Solution Approach 1:
The tubular insulator is nested within the recess of the attraction plate, and the adhesive layer is applied inside the tubular insulator. This nested configuration creates multiple insulating layers (tubular insulator + adhesive layer) that work together to prevent discharges between the power supply terminal and the base, significantly improving insulation reliability without excessive structural complexity.
Solution Approach 2:
The tubular insulator acts as an intermediary component between the power supply terminal and the base. It provides an additional insulating barrier that mediates the electrical isolation, preventing direct contact and potential discharges. The adhesive layer then bonds the tubular insulator in place while maintaining the insulating function.
2Reliability
If the adhesive layer is thin or has voids to maintain ease of manufacture, then the manufacturing is simple, but the insulation performance deteriorates causing discharges
Solution Approach 1:
The tubular insulator is nested in the recess and the adhesive layer is applied inside it, creating a layered insulating structure. This nested configuration ensures that even if the adhesive layer has minor voids or thickness variations, the tubular insulator provides an additional insulating barrier, maintaining reliable insulation performance while allowing the adhesive layer to be formed with standard manufacturing tolerances.
Solution Approach 2:
The tubular insulator is installed beforehand in the recess to provide a pre-formed insulating barrier. This prior cushioning measure ensures that even if the subsequently applied adhesive layer has voids or insufficient thickness in certain areas, the discharge path is still blocked by the tubular insulator, maintaining insulation reliability without requiring extremely precise adhesive layer formation.
3Force
If high DC voltage is applied to generate sufficient electrostatic attraction force, then the attraction force is sufficient, but the risk of discharge through the adhesive layer increases
Solution Approach 1:
The tubular insulator serves as an intermediary insulating barrier between the high-voltage power supply terminal and the conductive base. This additional insulating layer increases the breakdown voltage threshold, allowing high DC voltages to be applied for strong electrostatic attraction without increasing the risk of discharge through the adhesive layer, as the tubular insulator blocks the discharge path.
Solution Approach 2:
The nested configuration of the tubular insulator within the recess and the adhesive layer inside the tubular insulator creates multiple insulating barriers in series. This multi-layer insulation structure significantly increases the overall breakdown voltage, enabling the application of high DC voltages for strong electrostatic attraction while preventing discharges that would occur with a single adhesive layer.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances the reliability of insulation and reduces discharges, improving the durability of the electrostatic chuck by ensuring effective electrical isolation even under high DC voltages.
Implementation Method 1
An attraction electrode which generates electrostatic charge to electrostatically attract an attraction subject with the electrostatic chuck
Implementation Method 2
The base 81 incorporates a heater 84. The heater 84, which generates heat when supplied with voltage, maintains the ESC attraction plate 83 at a controlled temperature
Data Source
AI summary
An electrostatic chuck includes a base having a first through hole extending through the base. An electrostatic chuck attraction plate is bonded to the base. An attraction electrode is incorporated in the electrostatic chuck attraction plate to generates electrostatic charge and electrostatically attract an attraction subject. A recess is formed in the electrostatic chuck attraction plate in alignment with the first through hole. The recess partially exposes the attraction electrode. An adhesive layer is formed between the electrostatic chuck attraction plate and the base. The adhesive layer covers an inner surface of the recess. A tubular insulator is arranged in the recess. The tubular insulator includes a second through hole. A power supply terminal is arranged in the first through hole and the second through hole. The power supply terminal includes a distal portion electrically connected to the attraction electrode.