Electrostatic Chuck Repair via Conductive Coating

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Solution Overview

Problem

Conventional methods for repairing severed electrical connections in the balancing circuit of an electrostatic chuck, such as electron beam or laser welding, are costly and time-consuming, leading to increased ownership costs and extended chamber downtime.

Innovation Solution

A method involving the application of a conductive coating, comprising nano-particle materials, to establish a conductive path between the conductive tubing and the substrate spacing mask, which is then cured to restore electrical continuity, and a substrate support assembly with a conductive liner and tubing to facilitate this process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional welding techniques (electron beam or laser welding) are used to repair severed electrical connections, then the electrical connection is restored, but the repair cost increases and chamber downtime extends

Engineering Contradiction:

Improveelectrical connection integrityVSAvoidchamber downtime

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

The patent changes the repair method from welding (high energy, high temperature) to applying conductive adhesive (low energy, room temperature or controlled temperature). This parameter change in the repair process reduces both cost and time while maintaining electrical connection integrity. The conductive adhesive contains conductive particles that establish electrical pathways without requiring welding equipment or extended processing time.

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The patent replaces the mechanical/thermal welding system with a chemical bonding system using conductive adhesive. Instead of using electron beams or laser beams to melt and fuse materials, the invention uses adhesive chemistry to bond components while maintaining electrical conductivity through embedded conductive particles or fillers in the adhesive matrix.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Reliability

If conventional welding techniques are used to repair severed electrical connections, then the electrical connection is restored, but the ownership cost increases

Engineering Contradiction:

Improveelectrical connection integrityVSAvoidrepair cost

Core Design Contradiction:

ReliabilityVSEase of manufacture

Solution Approach 1:

The patent employs a disposable or consumable conductive adhesive material that can be easily applied and cured to restore electrical connections. This low-cost consumable material replaces expensive welding equipment usage and reduces repair costs significantly. The adhesive can be applied using simple dispensing methods without requiring costly welding machinery or specialized operator training.

Inventive Principle:

Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Ease of operation

If the conductive connection is disrupted over time, then the electrostatic chuck operation becomes dysfunctional, but the mechanical connection remains sound

Engineering Contradiction:

Improveelectrostatic chuck functionalityVSAvoidelectrical connection stability

Core Design Contradiction:

Ease of operationVSReliability

Solution Approach 1:

The patent uses composite conductive adhesive materials that combine the bonding properties of adhesives with the conductive properties of embedded particles (such as metal particles, carbon particles, or conductive fillers). This composite material simultaneously provides mechanical bonding to maintain structural integrity and electrical conductivity to restore electrical connections, addressing both requirements in a single material system.

Inventive Principle:

Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach provides a faster and more economical repair of the electrical connection, maintaining uniform and robust electrical contact, thus reducing the cost of ownership and extending the electrostatic chuck's lifetime.

Implementation Method 1

a conductive coating at least partially within the aperture and at least partially within the conductive tubing, wherein the conductive coating provides a conductive path between the conductive liner and the conductive tubing

Methodology Applied

Scientific EffectElectrical conduction: Conduction (electrical)

Implementation Method 2

A voltage is applied to one or more electrodes in the chuck to induce oppositely polarized charges in the substrate and the electrodes, respectively. The opposite charges pull the substrate against the chuck, thereby retaining the substrate.

Methodology Applied

Scientific EffectElectrostatic attraction: Electrostatics

Data Source

PatentUS10049908B2Methods and apparatus for electrostatic chuck repair and refurbishment

Publication Date: 2018.08.14 APPLIED MATERIALS INC

AI summary

In one embodiment of the invention, a substrate support assembly comprises an electrostatic chuck having an electrode embedded therein and having an aperture disposed therethrough, a conductive liner disposed on the surface of the electrostatic chuck within the aperture, a conductive tubing extending from a lower surface of the electrostatic chuck and axially aligned with the aperture, and a conductive coating at least partially within the aperture and at least partially within the conductive tubing, wherein the conductive coating provides a conductive path between the conductive liner and the conductive tubing.