Electrostatic Chuck Robotic Arm via Transformer Induction
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Solution Overview
Problem
Existing workpiece transfer systems in semiconductor manufacturing, which rely on vacuum sources for maintaining the position of wafers during transportation, complicate the robot structure, adding weight and cost, and potentially limiting motion due to inertial forces.
Innovation Solution
A workpiece transfer system utilizing an electrostatic chuck with electrodes on a dielectric surface, powered by a transformer coil system for contactless power transmission, allowing electrostatic attraction and retention of the workpiece, thereby eliminating the need for vacuum sources.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a vacuum source is introduced on the robot arm to maintain workpiece position, then the workpiece position stability is improved, but the device complexity and weight increase
Solution Approach 1:
The patent replaces the vacuum-based mechanical retention system with an electrostatic retention system. The electrostatic chuck uses electrostatic attraction forces generated by voltage applied to electrodes on the dielectric workpiece retaining surface to hold the workpiece, eliminating the need for vacuum lines and vacuum sources on the robot arm. This substitution reduces structural complexity while maintaining workpiece position stability during transportation.
2Reliability
If vacuum lines are added to the robot blade, then workpiece retention is improved, but the weight and cost of the robot increase
Solution Approach 1:
The patent replaces the vacuum-based retention mechanism with an electrostatic retention mechanism. The electrostatic chuck generates retention forces through electrostatic attraction between the charged electrodes and the workpiece on the dielectric surface, eliminating the need for heavy vacuum lines and vacuum sources. This significantly reduces the weight of the moving robot components while maintaining effective workpiece retention during acceleration and deceleration.
3Reliability
If vacuum structures are integrated into the robot blade, then workpiece position control is improved, but the motion capability of the robot blade is limited
Solution Approach 1:
The patent replaces the vacuum-based position control system with an electrostatic position control system. The electrostatic chuck can rapidly adjust retention forces through voltage control without the inertia and response delays associated with vacuum systems. This enables faster acceleration and deceleration of the robot blade while maintaining precise workpiece position control, thereby improving overall motion capability and speed.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances the mobility and efficiency of the workpiece transfer by reducing structural complexity and weight, while maintaining secure workpiece retention, thus improving the robot's motion capabilities and reducing operational costs.
Implementation Method 1
Electrical power or voltage provided to one of the primary transformer coil and secondary transformer coil of each joint, for example, produces mutual inductance between the primary transformer coil and secondary transformer coil of the respective joint, therein providing contactless power across each joint.
Implementation Method 2
a voltage applied to the one or more electrodes is configured to electrostatically attract a workpiece, such as a semiconductor wafer, to the dielectric workpiece retaining surface
Data Source
AI summary
A workpiece transfer system has a plurality of joints having a bearing and a primary and secondary transformer coil, wherein power provided to the primary transformer coil and secondary transformer coil of each joint produces mutual inductance between the primary and secondary transformer coil of the respective joint. A first pair of arms are rotatably coupled to a blade by a first pair of the joints, wherein the primary transformer coil of each of the first pair of joints is operably coupled to the first pair of arms, and the secondary transformer coil of each of the first pair of joints is operably coupled to the blade and an electrode beneath a dielectric workpiece retaining surface of the blade. The electrode is contactlessly energized through the transformer coils of the joint and the blade can chuck and de-chuck a workpiece by reversing current directions and by voltage adjustment.