Electrostatic Chuck Segmented Absorption Plates
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Solution Overview
Problem
Existing electrostatic chucks struggle to effectively support large glass substrates during semiconductor and display manufacturing processes, as they require larger capacities to handle increased substrate sizes without compromising absorption and support precision.
Innovation Solution
The electrostatic chuck design features a top plate divided into two regions with rotating absorption plates, allowing for the simultaneous support of large glass substrates by using static electricity forces, where one absorption plate supports one portion of the substrate and the other plate supports the remaining portion, maintaining the substrate's center in a stable position.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If a single large absorption plate is used to support large glass substrates, then the substrate can be fully supported, but the center of the substrate becomes loosened and cannot be precisely maintained
Solution Approach 1:
The absorption plate is divided into multiple separate absorption plates (first absorption plate, second absorption plate, etc.) that are positioned at different regions. This segmentation allows each plate to support specific portions of the substrate while maintaining the center region exposed, thereby preventing center loosening and improving positioning precision.
2Manufacturing precision
If multiple absorption plates are used to support large substrates, then the substrate center can be maintained, but the device complexity increases
Solution Approach 1:
Multiple absorption plates are merged into a coordinated system where they work together to support different regions of the substrate. The plates are positioned and configured to collectively provide stable support while maintaining the substrate center in an exposed state, achieving precision without excessive complexity.
Solution Approach 2:
The absorption plates are configured to be rotatable about rotation axes, allowing dynamic adjustment of their positions and orientations. This dynamic capability enables the plates to adapt to different substrate sizes and shapes while maintaining precise center positioning, reducing the need for complex fixed configurations.
3Adaptability or versatility
If absorption plates are made rotatable to improve substrate handling, then the substrate can be repositioned, but the device complexity increases
Solution Approach 1:
The absorption plates are designed with rotation capabilities about defined rotation axes, enabling dynamic repositioning of the substrate. This rotational freedom allows the system to adapt to different substrate configurations and processing requirements while maintaining a relatively simple mechanical structure through defined rotation centers.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enables efficient absorption and support of large glass substrates, preventing the center from being loosened and allowing for precise handling during manufacturing processes, such as organic material deposition.
Implementation Method 1
an electrostatic chuck is used to absorb and support an absorption target by using a static electricity force
Data Source
AI summary
An electrostatic chuck is disclosed. In one aspect, the electrostatic chuck includes a top plate, wherein first and second regions adjacent to each other are formed at a surface of the top plate. The electrostatic chuck also includes a first absorption plate positioned at the first region and a second absorption plate positioned at the second region to be separated from the first absorption plate. The first and second absorption plates are configured to support the absorption target.