Electrostatic Chuck Tension Structure for Shadow-Free Deposition
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The challenge in display panel fabrication is the deflection of substrates during deposition processes, leading to shadow effects and increased display defects due to inadequate adhesion between the substrate and the mask, which affects the precision and quality of the deposition material pattern.
Innovation Solution
An electrostatic chuck with a tension assist device featuring a stepped portion and a coupling portion is used to improve adhesion and suppress deflection, combined with a deposition apparatus that includes a tension unit to apply tensile force, ensuring accurate deposition by maintaining the substrate and mask in tight contact.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the substrate is disposed flat without tensioning, then the device structure is simpler, but the substrate deflects due to its own weight causing shadow effects and deposition defects
Solution Approach 1:
The substrate is tensioned before the deposition process using a tension device that applies force through tension assist devices with stepped portions. This preliminary tensioning prevents weight-induced deflection during deposition, eliminating shadow effects and ensuring precise material deposition without requiring complex real-time adjustment mechanisms
2Strength
If the mask and substrate are not in tight contact, then the adhesion requirement is reduced, but deposition material is deposited on dead zones causing shadow effects
Solution Approach 1:
The substrate is pre-tensioned using the tension device with stepped portions before deposition begins. This preliminary action ensures tight contact between the substrate and mask throughout the deposition process, preventing deposition material from reaching dead zones and eliminating shadow effects without requiring excessive adhesion strength
3Manufacturing precision
If the substrate is tensioned using a tension device, then substrate deflection is suppressed improving deposition accuracy, but the device complexity increases
Solution Approach 1:
The tension device is divided into multiple independent tension assist devices, each with stepped portions that engage with the substrate at different locations. This segmentation allows distributed tensioning across the substrate surface, achieving uniform deflection suppression while keeping each individual tension assist device structurally simple and easy to implement
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces substrate deflection and enhances the accuracy of the deposition process, minimizing shadow effects and improving the overall quality of the display panel by maintaining precise alignment and contact between the substrate and the mask.
Implementation Method 1
The electrostatic chuck is a member that attaches a substrate using electrostatic force
Implementation Method 2
to perform a deposition process by vaporizing a deposition material and spraying it
Implementation Method 3
In a deposition method, to perform a deposition process by vaporizing a deposition material and spraying it
Data Source
AI summary
Provided are an electrostatic chuck, a deposition apparatus including the same, and a display panel fabricated using the same. According to an aspect, there is provided an electrostatic chuck including, a body, and a tension assist device disposed at a border of the body, the tension assist device includes a stepped portion disposed on a side of the body, and an end of the stepped portion is disposed higher than an upper surface of the body.