Electrostatic Chuck Silicone Resin Sheet Thermal Stress
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Solution Overview
Problem
Existing electrostatic chuck devices face challenges in achieving uniform in-plane temperature distribution and durability due to rapid temperature changes, leading to issues like temperature variation and potential cracking.
Innovation Solution
An electrostatic chuck device is designed with a silicone resin sheet of specific thickness and Shore hardness interposed between the electrostatic chuck part and the heating member, along with an insulating material layer, to enhance heat resistance and shape change resistance, thereby improving in-plane temperature uniformity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a heating member is applied to an electrostatic chuck device to control wafer temperature, then temperature uniformity can be improved, but cracks may occur in the electrostatic chuck part or base part due to rapid temperature changes
Solution Approach 1:
A silicone resin sheet is introduced as an intermediary layer between the heating member and the electrostatic chuck part. This sheet absorbs thermal stress and prevents direct heat transfer that causes cracking, while still allowing effective heating. The sheet has specific properties (thickness 10-200 μm, Shore hardness 10-70) optimized for thermal management and stress absorption.
Solution Approach 2:
The patent specifies precise parameter ranges for the silicone resin sheet: thickness of 10-200 μm and Shore hardness of 10-70. These parameter optimizations ensure the sheet provides sufficient thermal insulation while maintaining flexibility to accommodate thermal expansion and contraction, preventing cracks during rapid temperature changes.
2Use of energy by moving object
If the heating member is directly bonded to the electrostatic chuck part, then heating efficiency is improved, but shape change and heat resistance deteriorate due to thermal stress
Solution Approach 1:
The silicone resin sheet serves as a mediator between the heating member and electrostatic chuck part, providing thermal isolation that prevents excessive heat transfer and resulting deformation. The sheet maintains appropriate thermal conductivity for efficient heating while protecting against thermal stress-induced shape changes.
Solution Approach 2:
The silicone resin sheet functions as a flexible thin film that can accommodate thermal expansion and contraction without transmitting excessive stress to the rigid electrostatic chuck part. Its flexibility allows it to absorb dimensional changes during heating cycles, maintaining shape stability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides excellent resistance to shape change and heat resistance, ensuring better in-plane temperature uniformity and durability of the electrostatic chuck device.
Implementation Method 1
a heating member bonded to a surface on the side opposite to the placing surface of the electrostatic chuck part
Implementation Method 2
a base part having a function of cooling the electrostatic chuck part
Implementation Method 3
a silicone resin sheet having a layer thickness of 10 μm or more and less than 200 μm and a Shore hardness (A) in a range of 10 to 70 is provided between the electrostatic chuck part and the heating member
Data Source
AI summary
An electrostatic chuck device includes: in order, an electrostatic chuck part having one principal surface serving as a placing surface on which a plate-shaped sample is placed, and having a built-in internal electrode for electrostatic attraction; a heating member bonded to a surface on the side opposite to the placing surface of the electrostatic chuck part in a pattern having gaps; a sheet material; and a base part having a function of cooling the electrostatic chuck part, in which a silicone resin sheet having a layer thickness of 10 μm or more and less than 200 μm and a Shore hardness (A) in a range of 10 to 70 is provided between the electrostatic chuck part and the heating member.