Electrostatic Chuck Spacing Control Across Vacuum Pressure Changes
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Solution Overview
Problem
Existing deposition apparatuses face challenges in stably adsorbing substrates to electrostatic chucks without causing damage or breakage when transitioning between atmospheric and vacuum conditions in a process chamber.
Innovation Solution
A deposition apparatus with a substrate support system that includes an electrostatic chuck, displacement sensors, and a controller to adjust the substrate support's position based on measured spacing distances under different pressure conditions, ensuring stable adhesion and preventing damage during pressure changes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the substrate support position is fixed during pressure transition, then the device structure is simple, but the substrate may be damaged or broken due to unstable adhesion
Solution Approach 1:
The displacement sensor measures the spacing distance between the electrostatic chuck and substrate support in advance under atmospheric pressure, and the controller pre-adjusts the substrate support position according to the measured value before vacuum pressure is applied. This preliminary positioning action prevents substrate damage by ensuring proper adhesion distance is established before the pressure transition occurs.
Solution Approach 2:
The displacement sensor continuously monitors the spacing distance between the electrostatic chuck and substrate support, providing real-time feedback to the controller. The controller adjusts the substrate support position based on this feedback signal to maintain the optimal spacing distance, thereby ensuring stable substrate adhesion during pressure transitions without causing damage.
2Manufacturing precision
If the substrate support position is adjusted based on displacement measurement, then substrate adhesion stability is improved, but the device complexity increases
Solution Approach 1:
The patent replaces complex mechanical positioning mechanisms with a sensor-based measurement and control system. The displacement sensor optically or electrically measures the spacing distance, and the controller automatically adjusts the substrate support position based on this measurement, achieving precise positioning without complex mechanical linkages or manual adjustment mechanisms.
Solution Approach 2:
The system performs self-adjustment of the substrate support position based on the displacement sensor's measurement. The controller automatically calculates the required position correction and actuates the adjustment mechanism without external intervention, enabling the system to self-correct positioning errors and maintain optimal substrate adhesion conditions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus ensures stable substrate adhesion without damage across pressure transitions, enhancing the reliability and durability of the deposition process.
Implementation Method 1
an electrostatic chuck spaced apart from the substrate support in the first direction
Data Source
AI summary
A deposition apparatus includes: a chamber including an internal space settable to either atmospheric conditions or vacuum conditions; a substrate support in the internal space of the chamber and configured to support a substrate; a first driver configured to reciprocate the substrate support in a first direction and a direction opposite to the first direction; an electrostatic chuck spaced apart from the substrate support in the first direction; a displacement sensor installed in the electrostatic chuck, and configured to measure a first spacing distance from the substrate support under the atmospheric conditions and a second spacing distance from the substrate support under the vacuum conditions; and a controller configured to adjust a position of the substrate support based on a displacement difference between the first spacing distance and the second spacing distance.