Electrostatic Chuck Separation for Damage-Free Substrate Handling
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in preventing damage to display panel cells and effectively separating substrates from electrostatic chucks during the etching process.
Innovation Solution
A substrate processing apparatus and method that includes a stage with an electrostatic chuck, a separating module with a push member to separate the substrate from the chuck, and a loading module with edge and central loading units to support and align the substrate, ensuring safe separation and alignment to prevent cell damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the substrate is chucked in an electrostatic chuck for the etching process, then the substrate can be held securely for processing, but the substrate cannot be effectively separated from the electrostatic chuck due to residual electrostatic charges
Solution Approach 1:
A push member is introduced as an intermediary component between the substrate and the external environment. This push member applies controlled mechanical force to the substrate to overcome residual electrostatic attraction, enabling separation without directly confronting the electrostatic chuck's holding mechanism. The push member acts as a mediator that translates controlled motion into substrate separation while avoiding damage to sensitive display panel cells.
Solution Approach 2:
The patent replaces purely electrostatic holding with a combined electrostatic-mechanical system. During separation, a push member provides mechanical force to counterbalance the electrostatic attraction. This substitution allows the system to transition from relying solely on electrostatic forces to using controlled mechanical intervention, enabling effective substrate removal while maintaining secure holding during processing.
2Manufacturing precision
If loading units are used to press the substrate toward the electrostatic chuck, then the substrate can be aligned and chucked effectively, but the loading units may contact and damage the display panel cells
Solution Approach 1:
The substrate holder is designed to support only the edge region of the substrate, specifically avoiding contact with the central area where display panel cells are located. This local differentiation in support function allows the loading units to apply force precisely at safe locations (edges) while leaving the sensitive cell areas untouched. The edge support structure provides sufficient alignment precision without creating damage risks to the cells.
Solution Approach 2:
The substrate support function is segmented into edge support (by substrate holder) and central area protection (by avoiding loading unit contact). This segmentation separates the alignment function from the potential damage source, allowing precise substrate positioning through edge support while the central cell-containing area remains free from mechanical contact that could cause damage.
3Ease of operation
If a push member is used to separate the substrate from the electrostatic chuck, then the substrate can be effectively removed, but the push member may damage the display panel cells if not controlled properly
Solution Approach 1:
The substrate holder is positioned and configured in advance to support the substrate edge before the push member engages. This preliminary positioning ensures that when the push member applies force for separation, the substrate is already stabilized at a safe location where the push force will not cause damage to the display panel cells. The preliminary edge support action prevents the push member from directly contacting or damaging the cell areas.
Solution Approach 2:
The substrate holder acts as an intermediary support structure between the push member and the substrate during separation. It provides a stable reference point and support location that guides the push member's action, ensuring that the separation force is applied safely at the substrate edge rather than directly on the sensitive cell areas. This intermediary support mediates the interaction to prevent damage while maintaining separation efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents damage to display panel cells by ensuring that loading units do not contact the cell area and enables safe separation of substrates from electrostatic chucks, even with residual electrostatic charges.
Implementation Method 1
an electrostatic chuck, which chucks a substrate
Data Source
AI summary
A substrate processing apparatus includes: a stage including an electrostatic chuck, which chucks a substrate; a separating module disposed on the stage and including a push member, which separates the substrate from the electrostatic chuck, and a substrate holder, which supports an edge of the substrate; and a loading module disposed under the stage and including a plurality of edge loading units, which press the edge of the substrate toward the electrostatic chuck, and a plurality of central loading units, which press a portion of the substrate positioned inside from the edge of the substrate toward the electrostatic chuck.