Electrostatic Chuck Mounting Surface Curvature Design
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Solution Overview
Problem
The existing methods for manufacturing electrostatic chuck devices often result in a concave surface with inflection points, leading to gaps between the sample and the chuck, making it difficult to maintain uniform temperature, and the use of non-metallic supporting plates increases manufacturing costs.
Innovation Solution
The electrostatic chuck device features a mounting surface with a concave or convex curved shape that gradually curves from the center to the periphery, eliminating inflection points and using an adhesive layer between the chuck part and the cooling base, with specific height differences and surface roughness to ensure uniform temperature and close contact with the sample.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If polishing processing is performed on the entire surface of the mounting plate to form a concave surface, then the mounting precision is improved, but inflection points are generated on the concave surface causing gaps between sample and chuck
Solution Approach 1:
The patent changes the surface shape parameters by eliminating inflection points from the concave surface, creating a pure concave profile that maintains mounting precision while preventing gaps between the sample and chuck during attraction
Solution Approach 2:
The patent applies a curved surface design with specific radius of curvature to the mounting plate, creating a concave surface that gradually curves from center to periphery without inflection points, improving both mounting precision and sample contact
2Manufacturing precision
If non-metallic materials are used for the supporting plate, then the manufacturing precision is improved, but the manufacturing cost increases
Solution Approach 1:
The patent changes the material parameter from non-metallic to metallic while compensating for precision requirements through optimized surface shape design and curvature parameters, thereby reducing manufacturing cost while maintaining mounting precision
Solution Approach 2:
The patent employs a composite structure combining metallic supporting plate with ceramic electrostatic chuck part, achieving both cost reduction and high precision mounting through the synergistic properties of different materials
3Ease of manufacture
If the mounting plate surface is made flat, then the manufacturing cost is reduced, but gaps are generated between sample and chuck making uniform temperature control difficult
Solution Approach 1:
The patent applies a concave curved surface design with optimized radius of curvature to the mounting plate, creating gradual curvature from center to periphery that eliminates gaps during sample attraction while maintaining manufacturability and enabling uniform temperature control
Solution Approach 2:
The patent creates different surface profiles in different regions of the mounting plate, with the concave shape providing gap prevention at the center while maintaining appropriate flatness at the periphery for sample contact
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design ensures a uniform surface temperature of the plate-like sample by preventing gaps and improving the attraction force, while reducing manufacturing costs by using metallic materials.
Implementation Method 1
an adhesive layer which is interposed between the electrostatic chuck part and the cooling base part
Implementation Method 2
the plate-like samples are attracted and fixed onto the attraction surface of the ceramic plate-shaped body due to the electrostatic attraction force generated by applying a voltage between the plate-like sample and the internal electrostatic attraction electrode
Implementation Method 3
a cooling base part which is configured to cool the electrostatic chuck part
Data Source
AI summary
An electrostatic chuck device (1) including: an electrostatic chuck part (2) which includes a base material (11) having a mounting surface (11a) on which a plate-like sample W is mounted, and an internal electrostatic attraction electrode (13) which electrostatically attracts the plate-like sample (W) to the mounting surface (11a); a cooling base part (3) which is configured to cool the electrostatic chuck part (2); and an adhesive layer (4) which is interposed therebetween, in which a shape of the mounting surface of the base material (11) includes a concave surface (23) or a convex surface, which is a curved surface that gradually curves from a center (11b) of the mounting surface (11a) toward an outer periphery (11c) of the mounting surface (11a) and includes no inflection point, and an absolute value of a difference between a height of a center of the concave surface (23) or the convex surface from a position of a main surface (3a) of the cooling base part (3) as a reference and a height of an outer periphery of the concave surface (23) or the convex surface from the position of the main surface (3a) of the cooling base part (3) as a reference is 1 μm or higher and 30 μm or lower.