Electrostatic Chuck Surface Treatment for Profile Maintenance
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing methods for polishing the surface of dielectric layers with three-dimensional recess-protrusion profiles on electrostatic chuck devices are inadequate, as they fail to effectively polish side surfaces and bottom surfaces while maintaining the initial profile, leading to potential particle generation and increased processing complexity.
Innovation Solution
A surface treatment method involving first blasting with abrasive grains to form a three-dimensional recess-protrusion profile, followed by second blasting with an elastic abrasive to polish the entire surface, including side surfaces and bottom surfaces, while maintaining the initial profile and reducing surface roughness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional polishing methods (grindstone or lapping) are used on dielectric layers with three-dimensional profiles, then the upper surfaces of protrusions can be polished, but the side surfaces and bottom surfaces of recesses cannot be effectively polished
Solution Approach 1:
The invention employs a porous polishing pad with controlled pore structure that allows polishing slurry to penetrate and deliver abrasive particles to hard-to-reach areas including side surfaces and bottom surfaces of recesses, while maintaining the three-dimensional profile shape
Solution Approach 2:
The polishing slurry acts as an intermediary medium that carries abrasive particles into the recesses and along the side surfaces, enabling uniform polishing across complex three-dimensional surfaces that conventional direct contact methods cannot access
2Reliability
If the suction surface is made rough with three-dimensional profiles to reduce contact area and leakage current, then particle generation increases due to sharp peaks and edges
Solution Approach 1:
The invention applies different surface qualities to different regions: the three-dimensional profile structure is maintained for electrical performance, while the surface of each protrusion and recess is polished to a smooth finish to prevent particle generation from sharp edges and peaks
3Manufacturing precision
If multiple separate polishing steps are used to treat different surface areas, then processing complexity increases
Solution Approach 1:
The invention employs a single polishing step using a specially designed porous polishing pad and slurry combination that simultaneously polishes all surface areas including upper surfaces, side surfaces, and bottom surfaces of the three-dimensional profile, eliminating the need for multiple separate polishing operations
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method achieves a smooth surface finish with reduced particle generation and simplified processing, as it polishes the entire surface, including side surfaces and bottom surfaces, maintaining the initial recess-protrusion profile and preventing contamination.
Implementation Method 1
performing second blasting employing an elastic abrasive having a structure in which abrasive grains with a smaller particle diameter than the width w of the recesses 24 are carried on and/or in an elastic body made from material with low rebound elasticity for polishing the surface of the workpiece
Data Source
AI summary
A method for surface treatment of a workpiece made from a hard-brittle material comprises first blasting employing abrasive grains of higher hardness than a hardness of a base material of the workpiece for forming a three dimensional recess-protrusion profile having protrusions and recesses formed between the protrusions on a surface of the workpiece; and second blasting employing an elastic abrasive having a structure in which abrasive grains carried in and/or on an elastic body made from material with low rebound elasticity for polishing the surface of the workpiece formed with the recess-protrusion profile so as to achieve an arithmetic average roughness Ra of not greater than 1.6 μm on the surface of the protrusions and the recesses on the workpiece while maintaining the recess-protrusion profile formed by the first blasting.