Electrostatic Chuck Connecting Part Tapered Geometry
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Solution Overview
Problem
Existing electrostatic chucks face reliability issues due to delamination and void formation between the internal electrode and connecting parts during sintering, especially with miniaturization, leading to poor electrical continuity and increased risk of electrical discharge.
Innovation Solution
The electrostatic chuck design features a connecting part with a gradually increasing angle between the electrode and the connecting part's tangential line, a convex ceramic substrate shape, and a recess for improved contact and integral sintering, ensuring reliable electrical continuity and reduced risk of discharge.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the outer diameter of the connecting part is miniaturized, then the electrostatic chuck achieves better clamping performance, but the reliability of electrical continuity deteriorates due to delamination and void formation during sintering
Solution Approach 1:
The invention changes the geometric parameters of the connecting part by introducing a tapered structure with a specific angle (α) between 0° and 45° relative to the central axis. This parameter change allows the connecting part to maintain structural integrity during sintering while achieving miniaturization, preventing delamination and void formation that would otherwise occur with smaller diameters.
Solution Approach 2:
The invention uses a composite structure where the connecting part is formed by a combination of metal particles and ceramic particles. This composite material approach enhances the sintering behavior and mechanical strength of the miniaturized connecting part, ensuring reliable electrical continuity even at small outer diameters by preventing the delamination and void formation that plague conventional designs.
2Manufacturing precision
If the connecting part has a smaller outer diameter, then the electrostatic chuck achieves higher precision, but the sintering process causes delamination between the internal electrode and connecting part
Solution Approach 1:
The invention introduces a specific geometric parameter - the taper angle (α) between 0° and 45° - which fundamentally changes how the connecting part interacts with the electrode during sintering. This angular parameter ensures that even with small outer diameters for high precision, the contact surface maintains adequate bonding stability and prevents delamination through the tapered geometry that distributes stress evenly.
Solution Approach 2:
The tapered structure of the connecting part introduces a curved geometric profile rather than a straight cylindrical form. This curvature (taper) allows the connecting part to maintain stable contact with the electrode during sintering shrinkage, preventing delamination while enabling the small outer diameter needed for high manufacturing precision.
3Volume of moving object
If the connecting part is miniaturized, then the electrostatic chuck achieves better performance, but metal material migrates to form voids due to surface tension during sintering
Solution Approach 1:
By changing the geometric parameters to include a tapered structure with angle (α) between 0° and 45°, the invention modifies the surface area distribution and contact characteristics of the miniaturized connecting part. This parameter change reduces the surface tension effects that cause metal migration and void formation, allowing miniaturization without the harmful void formation that would otherwise occur.
Solution Approach 2:
The composite structure of metal particles and ceramic particles in the connecting part modifies the sintering behavior at miniaturized dimensions. The ceramic component provides structural stability that prevents excessive metal migration, while the metal component ensures electrical conductivity, together preventing void formation that would result from miniaturization alone.
4Force
If the connecting part has a smaller outer diameter, then the electrostatic chuck achieves better clamping force, but the thermal expansion difference causes electrode breakage
Solution Approach 1:
The tapered geometry with angle (α) between 0° and 45° changes the stress distribution pattern in the connecting part. This parameter change allows the miniaturized connecting part to maintain adequate strength despite the thermal expansion difference between ceramic and metal, preventing electrode breakage while preserving the high clamping force achieved through miniaturization.
Solution Approach 2:
The composite structure of metal and ceramic particles in the connecting part creates a material with intermediate thermal expansion properties between pure metal and pure ceramic. This composite approach allows the miniaturized connecting part to achieve both high clamping force and sufficient connection strength, preventing electrode breakage that would occur with conventional materials at small dimensions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances the reliability of electrical continuity between the electrode and connecting part, reduces delamination, and suppresses warpage, resulting in improved contact and reduced risk of electrical discharge, thereby increasing the overall reliability of the electrostatic chuck.
Implementation Method 1
By application of electrostatic clamping force to the incorporated electrode, the electrostatic chuck clamps a substrate such as a silicon wafer by electrostatic force.
Data Source
AI summary
An electrostatic chuck includes: a ceramic dielectric substrate having a first major surface and a second major surface; an electrode interposed between the first and second major surfaces; and a connecting part connected to the electrode and including a first region in contact with the electrode, with a first direction being defined as a direction from the first major surface toward the second major surface, and a second direction being defined as a direction orthogonal to the first direction, the first region being configured so that in a cross section of the electrode and the connecting part as viewed in the second direction, an angle on a side of the connecting part between an extension line along outer shape on the side of second major surface of the electrode and a tangential line of outer shape of the connecting part gradually increases in the first direction.