Electrostatic Chuck Power Terminal Insulation Against High-Voltage Discharge
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing substrate fixing devices in film formation and plasma etching devices experience discharge phenomena due to gaps between components of the tubular insulating member, particularly at high voltages, compromising the electrical insulating properties.
Innovation Solution
A single, tubular insulating member is designed to surround the entire outer peripheral surface of the power supply terminal and extend over the through holes, eliminating gaps and enhancing electrical insulation by filling the space between the power supply terminal and the through holes, supported by an insulating film and adhesive to further improve insulation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a tubular insulating member is used to surround the power supply terminal, then electrical insulation is improved, but gaps between components can cause discharge at high voltages
Solution Approach 1:
The patent combines multiple insulating components (tubular insulating member, insulating film, and adhesive) into an integrated insulation system. The insulating film is formed on the inner surface of the tubular insulating member, and adhesive is applied to fill gaps, creating a merged structure that eliminates discharge pathways while maintaining electrical insulation.
Solution Approach 2:
The patent applies different materials with specific properties to different locations: the tubular insulating member provides bulk insulation, the insulating film provides surface insulation on critical surfaces, and the adhesive provides gap-filling insulation in specific regions. This local differentiation of material properties ensures comprehensive discharge prevention.
2Reliability
If multiple components are used in the tubular insulating member, then insulation coverage is improved, but gaps between components create discharge paths
Solution Approach 1:
The adhesive acts as an intermediary substance that fills the gaps between the tubular insulating member and the power supply terminal, as well as between the insulating film and other components. This intermediary material eliminates discharge paths created by component interfaces while simplifying the overall assembly by providing a gap-filling function.
3Object-affected harmful factors
If the insulating member surrounds the entire power supply terminal, then discharge prevention is improved, but manufacturing complexity increases
Solution Approach 1:
The insulating film is formed on the inner surface of the tubular insulating member before assembly, and adhesive is applied in advance to critical gap regions. These preliminary actions ensure complete insulation coverage while simplifying the final assembly process, as the critical insulation features are already in place before components are put together.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The improved electrical insulating property effectively prevents discharge occurrences between the base plate and power supply terminal, ensuring reliable operation even at high voltages.
Implementation Method 1
the electrode generates an attraction force by static electricity between the electrode and the substrate mounted on a mounting surface of the electrostatic chuck
Implementation Method 2
The tubular insulating member enhances an electrical insulating property between the base plate and the power supply terminal to prevent occurrence of discharge between the base plate and the power supply terminal
Data Source
AI summary
A substrate fixing device includes a base plate, an electrostatic chuck fixed on the base plate, a first through hole penetrating the base plate in a thickness direction, a recess provided in a lower surface of the electrostatic chuck and communicating with the first through hole, an electrode built in the electrostatic chuck, a power supply terminal inserted into the first through hole and electrically connected to the electrode exposed from the recess, and a tubular insulating member inserted into the first through hole and surrounding an outer periphery of the power supply terminal. The tubular insulating member is formed to surround an entire outer peripheral surface of a portion of the power supply terminal disposed inside the first through hole. The tubular insulating member is formed to extend over an entire length of the first through hole in an axial direction. The tubular insulating member is a single member.