Electrostatic Chuck Segmentation for Translucent Substrate Holding
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Solution Overview
Problem
Conventional electrostatic chucks fail to maintain a stable attraction force for translucent substrates like glass and sapphire during plasma etching or CVD processing due to the photoelectric effect, leading to positional deviations of the substrates.
Innovation Solution
An electrostatic chuck with a dielectric chuck plate and electrodes, equipped with a substrate holding section that provides adhesive force to secure the substrate, even when the attraction force decreases due to photoelectric effects, ensuring the substrate remains positioned during light-irradiated processing treatments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Force
If a dielectric chuck plate is used to hold translucent substrates, then the substrate can be attracted and held on the chuck plate, but the attraction force decreases due to photoelectric effect when light from plasma is incident into the chuck plate
Solution Approach 1:
The chuck plate surface is divided into a light-shielding section and a light-transmitting section. The light-shielding section prevents light from incident into the chuck plate, maintaining electrostatic attraction force, while the light-transmitting section allows light transmission. This segmentation resolves the contradiction by spatially separating the functions of light blocking and light transmission.
Solution Approach 2:
Different portions of the chuck plate surface are given different optical properties: the light-shielding section has light-blocking characteristics to prevent photoelectric effect, while the light-transmitting section has light-transmissive characteristics. This local differentiation of properties allows the system to maintain attraction force where needed while permitting light transmission where required.
2Force
If the chuck plate surface is made light-shielding to prevent photoelectric effect, then attraction force is maintained, but light from plasma cannot be transmitted through the substrate
Solution Approach 1:
The chuck plate surface is divided into a light-shielding section and a light-transmitting section. The light-shielding section prevents light from incident into the chuck plate, maintaining electrostatic attraction force, while the light-transmitting section allows light transmission. This segmentation resolves the contradiction by spatially separating the functions of light blocking and light transmission.
Solution Approach 2:
Different portions of the chuck plate surface are given different optical properties: the light-shielding section has light-blocking characteristics to prevent photoelectric effect, while the light-transmitting section has light-transmissive characteristics. This local differentiation of properties allows the system to maintain attraction force where needed while permitting light transmission where required.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The adhesive force of the substrate holding section effectively prevents positional deviations of the substrate on the electrostatic chuck, maintaining secure holding even when the attraction force is reduced, allowing for reliable processing in vacuum environments.
Implementation Method 1
a first electrode and a second electrode, both electrodes being disposed in the chuck plate such that a voltage is applied between the first and the second electrodes to thereby attract a to-be-processed substrate to the surface of the chuck plate
Implementation Method 2
part of the dielectric material that forms the chuck plate becomes electrically conductive through photoelectric effect, resulting in lowering in the attraction (or suction) force
Implementation Method 3
a substrate holding section having an adhesive force with respect to the to-be-processed substrate
Data Source
AI summary
An electrostatic chuck is provided which is arranged that, at the time of performing processing treatments of irradiating light to a to-be-processed substrate while holding the translucent to-be-processed substrate, the to-be-processed substrate can surely be held even in case the attraction force lowers due to photoelectric effect. An electrostatic chuck has a chuck plate made of a dielectric material, and a first electrode and a second electrode, both electrodes being disposed in the chuck plate. A voltage is applied between the first and the second electrodes to thereby attract the to-be-processed substrate S to the surface of the chuck plate. The electrostatic chuck has, on part of the surface of the chuck plate, a substrate holding section 64 which is made of an adhesive sheet and the like having an adhesive force with respect to the to-be-processed substrate.