Electrostatic Clamp Multi-Layer Film Lithography
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Solution Overview
Problem
Manufacturing electrostatic clamps using glass or glass ceramics with interposed electrodes is complex and expensive due to low yield and long lead times, making it difficult to achieve improved resolution in lithographic apparatuses for smaller feature sizes.
Innovation Solution
An electrostatic clamp comprising a multi-layer film with an electrically conducting layer between insulating layers, applied to a core member with projections and through holes, allowing the film to be positioned on the core's surface with projections extending through the holes, enabling effective substrate holding without the need for air pressure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If glass or glass ceramics with interposed electrodes are used for electrostatic clamps, then effective electrostatic clamping is achieved, but manufacturing complexity and cost increase due to difficult stack manufacturing with low yield and long lead times
Solution Approach 1:
The electrostatic clamp is divided into separate functional components: a core member with projections and a multi-layer film with through holes. This segmentation allows independent manufacturing of each component using standard processes, eliminating the need to manufacture complex stacked structures with interposed electrodes as a single integrated unit, thereby reducing manufacturing complexity and improving yield.
Solution Approach 2:
The patent replaces the traditional mechanical/electrical assembly approach (stacking glass or glass ceramic layers with electrodes) with a film-based system where a multi-layer film is applied to a core member. This substitution simplifies the manufacturing process by using depositable film layers that can be formed through standard semiconductor manufacturing techniques, reducing both complexity and lead time.
2Reliability
If glass or glass ceramics with interposed electrodes are used for electrostatic clamps, then effective electrostatic clamping is achieved, but production time increases due to long lead times
Solution Approach 1:
The core member with projections is prepared in advance, and the multi-layer film is designed to be applied through standard deposit processes. This preliminary preparation of components allows for parallel manufacturing and assembly, significantly reducing the overall production lead time compared to the sequential manufacturing required for stacked glass or glass ceramic structures with interposed electrodes.
3Reliability
If conventional vacuum-based substrate holders are used, then substrate clamping works in vacuum environments, but they cannot function with EUV radiation sources that require vacuum beam paths
Solution Approach 1:
The patent changes the fundamental operating parameters of the substrate holder by using electrostatic forces generated through voltage applied to the multi-layer film rather than relying on vacuum pressure differentials. This parameter change allows the clamp to function effectively in vacuum environments required for EUV lithography while maintaining substrate holding capability, as the electrostatic force mechanism is independent of the vacuum condition.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution simplifies the manufacture of electrostatic clamps, reduces complexity and costs, and allows for the use of vacuum environments necessary for extreme ultraviolet lithography by providing a robust and efficient clamping mechanism for substrates in lithographic apparatuses.
Implementation Method 1
In one example of such an electrostatic chuck (or clamp) a potential difference is applied between an electrode on the substrate and an electrode in or on the substrate table. When the potential difference is applied, the electrode of the substrate and the electrode of the table become oppositely charged and attract each other with sufficient force to clamp the substrate in place.
Data Source
AI summary
An electrostatic clamp for use in holding an object onto a supporting table, the electrostatic clamp comprising: a multi-layer film comprising an electrode defined in an electrically conducting layer which is positioned between electrically insulating layers.