Electrostatic Clamp Concentric Gap Gas Leak Control
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Solution Overview
Problem
Existing electrostatic clamp systems experience gas leaks between dissimilar materials, leading to poor process control and substrate contamination due to thermal mismatch and imperfect sealing, resulting in non-uniform temperature gradients and high gas leakage rates into the process chamber.
Innovation Solution
The electrostatic clamp system incorporates a concentric gap configuration with isolated inner and outer compartments, where the heating block and base are slidably coupled with sealing surfaces, and an annular portion to minimize gas leaks by maintaining a lower pressure in the outer compartment through pumping, ensuring effective thermal conduction while preventing gas contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If gas is provided between heating block and base to transfer heat, then thermal conduction is improved, but gas leakage into process chamber increases
Solution Approach 1:
The gap between the heating block and base is segmented into an inner gap and an outer gap that are isolated from each other. The inner gap receives gas for thermal conduction, while the outer gap acts as a barrier to prevent gas leakage into the process chamber. This segmentation allows the system to maintain effective heat transfer while blocking the harmful gas leakage pathway.
2Temperature
If high pressure gas is used to transfer heat rapidly, then thermal mismatch strain is reduced, but gas leakage rate increases
Solution Approach 1:
By dividing the gap into pressure-isolated inner and outer regions, the system can maintain high gas pressure in the inner gap for rapid thermal transfer without causing proportional increases in leakage. The outer gap acts as a pressure barrier, decoupling the thermal transfer efficiency from the leakage rate.
3Stability of the object's composition
If heating block and base are not bonded together, then thermal mismatch strain is avoided, but thermal conduction decreases
Solution Approach 1:
Gas is introduced into the gap between the heating block and base to serve as a thermal conduction medium. This pneumatic approach enables effective heat transfer without requiring direct mechanical bonding between the dissimilar materials, thereby avoiding thermal mismatch strains while maintaining necessary thermal conduction.
4Use of energy by moving object
If gas pressure in gap is increased to improve thermal conduction, then heat transfer efficiency increases, but gas leakage into chamber increases
Solution Approach 1:
The gap is segmented into an inner gap for heat transfer and an outer gap as a leakage barrier. This allows high gas pressure to be maintained in the inner gap for efficient thermal conduction while the outer gap, being isolated and potentially evacuated or at lower pressure, prevents proportional increases in gas leakage into the process chamber.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces gas leakage into the process chamber, maintains uniform thermal conduction, and prevents substrate contamination by controlling gas pressure, thereby enhancing process control and substrate temperature stability.
Implementation Method 1
The gas may aide in thermal conduction to maintain a rapid heat flow into base 12
Implementation Method 2
electrostatic clamp systems
Data Source
AI summary
An electrostatic clamp includes a heating block for heating a substrate, the heating block having a first surface disposed toward the substrate and a second surface opposite the first surface. A base is arranged to adjoin at least a portion of the second surface of the heating block. The adjoined base and heating block may mutually define an inner gap between a first portion of the heating block and the base. An outer gap is arranged concentric with the inner gap between a second portion of the heating block and the base, the inner and outer gaps being isolated from one another by a first sealing surface formed between the second surface of the heating block and the base.