Electrostatic Deflection Circuit for High Precision Beam Measurement
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Solution Overview
Problem
Conventional electronic beam measuring apparatuses with both electrostatic and electromagnetic deflectors face challenges in achieving high precision and magnification due to electromagnetic induction, complex structure, and mechanical alignment issues, while dual-part electrostatic deflector setups result in complicated and expensive structures with difficulty in high precision imaging.
Innovation Solution
An electrostatic deflection circuit and method that switches between low and high magnification deflection circuits using operational amplifiers with different amplification factors and a switch circuit to output deflection signals to an electrostatic deflector based on scan magnification, simplifying the structure and improving precision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If both electrostatic deflector and electromagnetic deflector are arranged shifted in the direction of the light axis, then high magnification scan is achieved, but electromagnetic induction causes field of vision shift and beam distortion
Solution Approach 1:
The patent removes the electromagnetic deflector from the system and uses only the electrostatic deflector for both low magnification and high magnification scans. This extraction eliminates the harmful electromagnetic induction effect that caused field of vision shift and beam distortion, while maintaining the ability to achieve high magnification through electrostatic deflection alone.
Solution Approach 2:
The electrostatic deflector is designed to perform multiple functions: it handles both low magnification scanning and high magnification scanning that previously required separate electrostatic and electromagnetic deflectors. This multi-functionality eliminates the need for the electromagnetic deflector while maintaining all necessary scanning capabilities.
2Measurement precision
If both electrostatic deflector and electromagnetic deflector are provided, then high magnification capability is achieved, but the structure becomes complicated and large
Solution Approach 1:
The electromagnetic deflector is extracted from the system, leaving only the electrostatic deflector. This simplifies the overall structure by removing redundant components, reducing the apparatus size, and eliminating the complexity of coordinating two different deflector types while maintaining high magnification capability through the electrostatic deflector alone.
Solution Approach 2:
The functions of both low magnification scanning and high magnification scanning are merged into a single electrostatic deflector system. This consolidation eliminates the need for separate deflectors and their associated control systems, resulting in a simpler, more compact apparatus structure.
3Measurement precision
If deflector is divided into two parts of upstream side and downstream side, then high magnification scan is achieved, but the structure becomes complicated and expensive
Solution Approach 1:
The electrostatic deflector is designed to handle both low magnification and high magnification scanning functions that previously required separate upstream and downstream deflector parts. This multi-functional design eliminates the need for dividing the deflector into multiple parts, simplifying the structure and reducing cost while maintaining high magnification capability.
4Measurement precision
If electromagnetic deflector with coil is used, then high magnification scan is achieved, but electromagnetic induction shifts field of vision center and generates distortion
Solution Approach 1:
The patent replaces the electromagnetic deflector (which uses electromagnetic fields generated by coils) with an electrostatic deflector (which uses electrostatic fields). This substitution eliminates the electromagnetic induction effect that causes field of vision shift and beam distortion, while maintaining the ability to achieve high scan magnification through electrostatic deflection.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables high precision electronic beam measurement with simplified apparatus structure by switching between low and high magnification deflection circuits, reducing aberration and complexity, and enhancing control over the beam for high-resolution imaging.
Implementation Method 1
the electrostatic deflector, compared with the electromagnetic deflector, has characteristics such as to be able to obtain a large amount of deflection with small size and to be able to have a high speed scan rate because a high speed deflection is possible
Implementation Method 2
a deflection circuit for low magnification comprising a first operational amplifier of a first amplification factor which amplifies the deflection signal by the first operational amplifier, a deflection circuit for high magnification comprising a second operational amplifier of a second amplification factor which is lower than the first amplification factor which amplifies the deflection signal by the second operational amplifier
Data Source
AI summary
An electrostatic deflection circuit and method of an electronic beam measuring apparatus which can achieve the high precision of the electronic beam measuring and contribute to the simplification of the structure of the apparatus is provided. In an analog arithmetic circuit included in an analog operation part constituting an electrostatic deflection circuit, output voltages of multipliers are added and output by an adder. When the magnification is low, as the side of an ordinarily closed contact is closed driven by a relay driving circuit, the output of the adder is amplified by a high gain amplifier with a high amplification factor and applied to an electrostatic deflecting board. When the magnification is high, the side of an ordinarily open contact is closed and it is amplified by a low gain amplifier with a low amplification factor and applied to the electrostatic deflecting board in the same way.