Electrostatic Deflector with Conductive Rods for Aberration Control
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Solution Overview
Problem
Electrostatic deflectors with (4+8m) electrodes face issues with deflection aberrations due to higher-order components, and conventional antistatic measures either destroy symmetry or significantly increase the deflector's size, limiting its usage, especially in in-lens designs.
Innovation Solution
The electrostatic deflector is designed with (4+8m) pillar-like electrodes arranged symmetrically, featuring bent portions in gaps and holes with conductive rod-like members to prevent electrical charging of the support body, maintaining symmetry and removing higher-order components without increasing the deflector's size.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional antistatic measures are applied to electrostatic deflectors with (4+8m) electrodes, then electrical charging of the support body is prevented, but the symmetry of the deflector is destroyed or the size is significantly increased
Solution Approach 1:
A conductive member is introduced as an intermediary element between the insulating support body and the electrodes. This conductive member serves as a charge dissipation path, preventing electrical charging of the support body while maintaining the symmetric arrangement of electrodes. The conductive member is positioned at the center of the deflector where it can effectively drain charges without disrupting the external symmetry required for proper beam deflection.
Solution Approach 2:
The conductive member is connected to the insulating support body to create an equipotential region. By maintaining the same electrical potential throughout the support structure, charge accumulation is prevented without requiring asymmetric modifications to the electrode configuration. This equipotential connection allows the support body to safely dissipate charges while the electrodes maintain their symmetric positioning for optimal optical performance.
2Reliability
If conventional antistatic measures are applied to electrostatic deflectors with (4+8m) electrodes, then electrical charging of the support body is prevented, but the deflector size is significantly increased
Solution Approach 1:
A conductive member is introduced as an intermediary element between the insulating support body and the electrodes. This conductive member serves as a charge dissipation path, preventing electrical charging of the support body while maintaining the symmetric arrangement of electrodes. The conductive member is positioned at the center of the deflector where it can effectively drain charges without disrupting the external symmetry required for proper beam deflection.
Solution Approach 2:
The conductive member is strategically positioned to utilize the existing electric fields within the deflector for charge dissipation. The structure allows charges to naturally flow through the conductive member to the support body without requiring external active components or additional space. This self-service approach prevents electrical charging using the deflector's own operational fields, avoiding size increase.
3Reliability
If bent portions are added to gaps between electrodes to prevent beam leakage, then electrical charging is prevented, but higher-order components causing deflection aberrations are not removed
Solution Approach 1:
The deflector structure is segmented into distinct functional zones: the bent portions at the gaps between electrodes handle beam containment and charge prevention, while the central region maintains the symmetric potential distribution required for aberration correction. This segmentation allows each zone to independently perform its specific function without compromising the other, enabling both beam leakage prevention and removal of higher-order components through the (4+8m) electrode configuration.
Solution Approach 2:
Different regions of the deflector are given different properties: the gap regions have bent portions for beam containment, while the central axis region maintains symmetric potential distribution for aberration-free deflection. The conductive member is placed only at the center where it provides charge dissipation without affecting the local symmetry required for removing higher-order components. This local differentiation allows simultaneous achievement of beam leakage prevention and aberration correction.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively cancels out higher-order components causing deflection aberrations while maintaining the deflector's symmetry and preventing electrical interference, allowing for accurate beam deflection without enlarging the device, thus enhancing its usability in various applications, including in-lens designs.
Implementation Method 1
The electrostatic type deflects a charged-particle beam by an electric field that is produced by applying a voltage to plural electrodes
Implementation Method 2
a condenser lens 2 for focusing the beam onto a material 4 to be written
Data Source
AI summary
There is disclosed an electrostatic deflector having four pillar-like identical electrodes spaced from each other by 90°. An even number of pillar-like electrodes are disposed in each space between the four electrodes. Spaces are formed on both sides of each one of the first electrodes and have bent portions. The even number of electrodes are arranged symmetrically relative to a third or fourth vertical plane including an axis spaced from the X-axis by 45° or −45°, respectively. Holes are formed across each of the third and fourth vertical planes. Rod-like members are inserted in the holes.