Electrostatic Dissipation Device with Static Sensing
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Solution Overview
Problem
Current electrostatic dissipation devices in semiconductor manufacturing suffer from energy wastage, inadequate ion dispersion, and reduced lifespan due to continuous ion generation even after electrostatic balance is achieved, leading to potential damage and high costs from electrostatic discharge.
Innovation Solution
An electrostatic dissipation device with static sensing capabilities, featuring an ion transmitting unit, an ion generating unit, and a static sensing unit that dynamically generates either positive or negative ions and airflow based on detected static charges, ceasing operations when balance is achieved to prevent unnecessary energy consumption and extend device lifespan.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If continuous ion generation is used to eliminate static, then electrostatic elimination is maintained, but energy is wasted and device lifespan is reduced
Solution Approach 1:
The patent employs a static sensor to detect the electrostatic charge level on the workpiece and provides feedback to the control circuit. The control circuit adjusts the ion generation accordingly - when static charge exceeds a threshold, ions are generated; when balance is achieved, ion generation stops. This feedback mechanism eliminates energy waste while maintaining electrostatic elimination effectiveness.
Solution Approach 2:
The system transitions from static continuous ion generation to dynamic conditional ion generation. The ion generating unit is activated or deactivated based on real-time static detection, making the system adaptive to actual electrostatic conditions rather than operating continuously, thus reducing energy consumption.
2Reliability
If continuous ion generation is used to eliminate static, then electrostatic elimination is maintained, but device lifespan is reduced
Solution Approach 1:
The control circuit receives feedback from the static sensor and stops ion generation when electrostatic balance is detected. This prevents unnecessary continuous operation of the ion generating unit, reducing wear and extending device lifespan while maintaining effectiveness when needed.
Solution Approach 2:
Instead of continuous operation, the ion generating unit operates periodically based on static detection needs. The system activates ion generation only during periods when static charge is detected and deactivates it when balance is achieved, reducing overall operational stress on the device.
3Reliability
If additional discharge electrodes are added to improve ion dispersion, then electrostatic elimination coverage is enhanced, but device complexity increases
Solution Approach 1:
The patent introduces an air blowing unit that uses airflow to disperse ions toward the workpiece. This pneumatic approach replaces the need for multiple complex discharge electrode arrangements, achieving good ion dispersion with a simpler device structure.
Solution Approach 2:
Air acts as an intermediary medium to transport and disperse ions. Instead of relying solely on multiple electrodes to create complex electric field patterns for ion dispersion, the system uses airflow as a mediator to distribute ions effectively, simplifying the device structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution accelerates electrostatic dissipation by generating ions with opposing polarity to detected charges, reduces energy wastage by ceasing operations when balance is reached, and extends the life span of the device by minimizing unnecessary operation, thereby enhancing the reliability and efficiency of semiconductor manufacturing processes.
Implementation Method 1
the ion generating unit includes a circuit controller electrically connected to the air flow control circuit, an ion generating circuit electrically connected to the circuit controller, and at least one ion discharge needle disposed on the casting and electrically connected to the ion generating circuit
Implementation Method 2
the ion transmitting unit includes a casting, an air flow generator disposed in the casting, and an air flow control circuit electrically connected to the air flow generator
Implementation Method 3
the static sensing unit includes a static sensor electrically connected to the circuit controller, and the static value is detected and provided as feedback to the circuit controller by the static sensor
Data Source
AI summary
An electrostatic dissipation device with static sensing is applicable to dissipate electrostatic charges on an object, comprising an ion transmitting unit, an ion generating unit, and astatic sensing unit. The static value of the object is provided as feedback to the ion generating unit by the static sensing unit, and the ions with polarity opposing to the static value of the object are generated by the ion generating unit, by which adequate air flow generated by the ion transmitting unit is blown to the object for ion neutralization, so that the static can be dissipated. When the static of the object is dissipated, the operation of the ion transmitting unit and the ion generating unit are ceased, so the power of the electrostatic dissipation can be saved.