Electrostatic Dust Collector Mounting for Clean Semiconductor Chambers

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Existing dust collectors in semiconductor manufacturing require a power generator and fixing members, which can generate particles or detach during vacuum conditions, posing challenges in maintaining cleanliness.

Innovation Solution

A dust collector design using alternating conductor and dielectric layers that create an electrostatic adsorption force, allowing installation without a power generator or fixing members, and effectively capturing charged and uncharged particles.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a power generator and fixing members are used to install the dust collector, then the dust collector can be installed in a manufacturing chamber, but particles are generated from the fixing member or the dust collector peels off during vacuum conditions

Engineering Contradiction:

Improveinstallation stabilityVSAvoidparticle generation

Core Design Contradiction:

ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent replaces the mechanical fixing system (bolts, adhesives) with an electrostatic field-based fixing mechanism. The dust collector uses electrostatic attraction between charged electrode layers to adhere to the manufacturing chamber wall, eliminating mechanical components that generate particles during installation or operation.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the physical state and properties of the fixing mechanism by using electrostatic fields instead of mechanical forces. By controlling the charge parameters of the electrode layers, the dust collector achieves reliable adhesion without contact, preventing particle generation from mechanical interference.

Inventive Principle:

Principle #35Parameter changes

2Object-generated harmful factors

If adhesive is used as fixing member, then the dust collector can be installed without mechanical fasteners, but air bubbles expand in vacuum causing the dust collector to peel off and generate unwanted substances

Engineering Contradiction:

Improveparticle generation from fastenersVSAvoidinstallation stability

Core Design Contradiction:

Object-generated harmful factorsVSReliability

Solution Approach 1:

The patent eliminates adhesive-based mechanical fixing by substituting it with an electrostatic field-based system. The charged electrode layers create electrostatic attraction forces that hold the dust collector in place without requiring any material contact, thus avoiding air bubble expansion issues and chemical contamination from adhesives.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces an electrostatic field as an intermediary between the dust collector and the manufacturing chamber wall. This field-based intermediary transmits the holding force without requiring physical contact, eliminating the problems associated with adhesive materials in vacuum environments.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Reliability

If mechanical fastening members are used, then the dust collector can be securely installed, but particles are generated from the fixing member itself

Engineering Contradiction:

Improveinstallation stabilityVSAvoidparticle generation from fixing member

Core Design Contradiction:

ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent replaces mechanical fastening members (bolts, clips, or other physical fasteners) with an electrostatic field-based fixing system. The charged electrode layers generate electrostatic attraction that secures the dust collector without any mechanical contact, thereby eliminating particle generation from the fastening components.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design enables stable installation and efficient particle collection without generating additional particles, maintaining cleanliness in semiconductor manufacturing environments.

Implementation Method 1

A dust collector design using alternating conductor and dielectric layers that create an electrostatic adsorption force

Methodology Applied

Scientific EffectElectrostatic adsorption: Electrostatics

Implementation Method 2

effectively capturing charged and uncharged particles

Methodology Applied

Scientific EffectElectrostatic attraction: Electrostatics

Data Source

PatentEP4618133A1Dust collector and apparatus for producing semiconductors

Publication Date: 2025.09.17 CREATIVE TECHNOLOGY CORP

Figure 1~3
Figure 4
Figure 5

AI summary

[Problem to be solved] To provide a dust collector that can be installed in a desired location without using a power generator and a fixing member. [Solution] A dust collector 1A includes: a first electrode layer 12 formed of a material including a conductor; a second electrode layer 14 formed of a material including a conductor and disposed to face the first electrode layer 12; a first insulating layer 11 formed of a dielectric, disposed between the first electrode layer 12 and a fixed object S, and configured to insulate the first electrode layer 12 from the fixed object S; a second insulating layer 13 formed of a dielectric, disposed between the first electrode layer 12 and the second electrode layer 14, and configured to insulate the first electrode layer 12 from the second electrode layer 14; and a third insulating layer 15 disposed on a surface opposite to a surface of the second electrode layer 14 facing the fixed object S, and configured to insulate the second electrode layer 14.