Electrostatic Fins for MEMS Micromirror Field Redistribution

The patent applies local quality by introducing electrostatic fins at specific locations on the micromirror structure. These fins are positioned at the edges of the micromirror where electrostatic fields are most concentrated, creating a non-uniform distribution of electrostatic coupling elements. This localized modification redistributes the electrostatic field density, preventing peak field concentrations while maintaining overall micromirror functionality.

The micromirror structure is segmented by adding discrete electrostatic fins rather than using a uniform structure. The fins divide the electrostatic interaction into multiple localized points along the micromirror edges, transforming a continuous electrostatic field problem into discrete, manageable segments. This segmentation allows better control over field distribution and reduces harmful peak fields.

The patent addresses the thickness-coupling tradeoff by extending the electrostatic interaction into a third dimension through vertical fins. Instead of relying solely on the horizontal mirror surface area for electrostatic coupling, the fins provide additional vertical surface area that enhances coupling without increasing the mirror thickness. This dimensional extension allows thicker mirrors to maintain efficient electrostatic coupling.

The electrostatic fins concentrate the electrostatic coupling function at specific locations rather than distributing it uniformly across the mirror surface. By placing fins at strategic positions where field lines are most dense, the structure achieves efficient coupling even with increased thickness, as the fins create localized regions of enhanced electrostatic interaction that compensate for the reduced field penetration through thicker material.

The complex field redistribution problem is solved by segmenting the solution into simple, discrete fin elements. Rather than attempting to redesign the entire micromirror structure, the patent divides the correction function into multiple identical or similar fin segments positioned at different locations. This modular approach simplifies manufacturing while achieving the complex goal of field redistribution.

The electrostatic fins act as intermediary elements between the electrodes and the micromirror surface. These fins mediate the electrostatic interaction by providing an intermediate surface that shapes and redistributes the field lines. This intermediary structure simplifies the overall system by decoupling the electrode design from the mirror design, allowing each to be optimized independently while the fins handle the field distribution function.