Electrostatic Fluid Purification via Current Density Control
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Solution Overview
Problem
The miniaturization of semiconductor processes has outpaced the improvement of filtration technologies, necessitating a new method to effectively remove extremely fine impurities, such as small particles and metal ions, from fluids used in these processes.
Innovation Solution
An electrostatic purification device and system that utilizes a purification tank with electrodes, a DC power supply, and a controller to monitor current density, allowing for batch purification of fluids, ensuring high purity and efficiency by controlling the introduction and discharge of fluids and incorporating a heat exchanger for temperature management.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If traditional filtration methods are used, then the device structure is simple and easy to operate, but the purification efficiency is insufficient for extremely fine impurities
Solution Approach 1:
The patent replaces the mechanical filtration system with an electrostatic purification system. Instead of using physical filters to remove impurities, the invention applies DC voltage to electrodes to generate electrostatic forces that attract and remove charged impurities (particles and metal ions) from the fluid. This substitution enables effective removal of extremely fine impurities that traditional mechanical filters cannot capture, directly resolving the contradiction between purification efficiency and device complexity.
Solution Approach 2:
The patent changes the fundamental parameter of impurity removal from mechanical physical blocking to electrostatic force-based attraction. By applying DC voltage and controlling current density between electrodes, the system dynamically adjusts the purification process to target charged impurities. This parameter change allows the system to achieve high purification efficiency for sub-micron particles and metal ions while maintaining a relatively simple device structure consisting mainly of electrodes, power supply, and control circuitry.
2Manufacturing precision
If batch purification is implemented with controlled fluid introduction and discharge, then the purification purity is maximized, but the processing time increases
Solution Approach 1:
The patent implements a feedback control mechanism where the controller continuously monitors the current density between the electrodes during purification. Based on this real-time feedback, the controller determines when the purification is complete and automatically controls the discharge valve to release the purified fluid. This feedback-based approach ensures that the fluid is purified to the maximum possible purity level while avoiding unnecessary extended processing time, thus resolving the contradiction between purification purity and processing time.
Solution Approach 2:
The patent employs dynamic control of the purification process by continuously monitoring current density and adjusting the discharge timing accordingly. Rather than using fixed time intervals for batch purification, the system dynamically determines the optimal discharge moment based on real-time electrostatic purification effectiveness. This dynamic approach allows the system to achieve high purification purity while minimizing processing time by discharging the fluid as soon as purification criteria are met.
3Reliability
If DC voltage is applied continuously to electrodes, then the electrostatic purification effectiveness is maximized, but the energy consumption increases
Solution Approach 1:
The patent employs periodic or controlled DC voltage application to the electrodes rather than continuous voltage. The power supply is activated only when needed during the purification process, and the controller manages the voltage application based on the purification stage and current density requirements. This periodic action maintains high purification effectiveness by applying voltage during critical purification phases while reducing overall energy consumption by avoiding continuous voltage application, thus resolving the contradiction between purification effectiveness and energy consumption.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the rapid and efficient removal of impurities from fluids in semiconductor processes, achieving high purity in a short time by leveraging electrostatic attraction and controlled fluid management, thereby addressing the limitations of traditional filtration methods.
Implementation Method 1
An electrostatic purification device and system that utilizes a purification tank with electrodes, a DC power supply, and a controller to monitor current density
Implementation Method 2
a heat exchanger configured to cool the fluid accommodated in the purification tank housing
Data Source
AI summary
An electrostatic purification device includes a purification tank housing configured to accommodate a fluid, a first electrode and a second electrode provided in the purification tank housing, a direct current (DC) power supply configured to apply a DC to the first electrode and the second electrode, a controller configured to monitor a current density between the first electrode and the second electrode, and determine whether purification is completed based on the current density, a first valve configured to control an introduction flow of the fluid into the purification tank housing, a second valve configured to control a discharge flow of the fluid from the purification tank housing, and a heat exchanger configured to cool the fluid accommodated in the purification tank housing.