Electrostatic Holding Device Charge Storage Circuit
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Solution Overview
Problem
Conventional electrostatic holding devices for semiconductor wafers suffer from substantial energy loss during discharge, require high-power voltage sources, and have limited mobility due to bulky connections and high-voltage isolation requirements, leading to inefficient charging processes and prolonged processing times.
Innovation Solution
An electrostatic holding device with a clamp carrier, voltage source, and charge storage device that uses inductive or capacitive converters and storage capacitances to temporarily store and redirect discharge currents, reducing energy loss and allowing for lower power voltage sources, and enabling more flexible operation by integrating components for compact construction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the clamp carrier is discharged by connecting to ground, then the component is released, but substantial energy is lost
Solution Approach 1:
A charge storage device with storage capacitance is introduced as an intermediary between the clamp carrier and ground. During discharge, the storage capacitance temporarily receives charges from the clamp carrier, preventing direct energy loss to ground. The stored charges can then be reused for subsequent charging operations, significantly reducing overall energy consumption.
2Productivity
If high current intensity is used for charging, then charging time is minimized, but high-power voltage sources are required
Solution Approach 1:
The charge storage device performs preliminary action by storing charges during the discharge phase. This pre-stored energy is then available to supplement or replace the voltage source during subsequent charging operations, reducing the power requirements and allowing for smaller, more compact voltage sources while maintaining fast charging speeds.
3Productivity
If high-power voltage sources are used, then charging is fast, but the device size and mass increase
Solution Approach 1:
Instead of discarding the energy in the voltage source when not in use, the charge storage device recovers and stores energy during discharge cycles. This recovered energy is then reused for charging, allowing the system to maintain high charging speeds with a smaller, lighter voltage source that doesn't need to be oversized for peak power demands.
4Reliability
If voltage sources are placed outside the vacuum chamber, then isolation and arcing issues are managed, but mobility is restricted
Solution Approach 1:
The charge storage device is nested within or integrated with the clamp carrier structure, allowing the entire assembly to move together as one unit. This eliminates the need for long external connections and improves mobility while maintaining reliable electrical isolation through the compact integrated design.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution reduces energy consumption, minimizes the power requirements of voltage sources, enhances mobility, and accelerates charging and declamping processes, thereby improving the efficiency and flexibility of semiconductor processing.
Implementation Method 1
the voltage source device contains an inductive or capacitive, direct current voltage converter
Implementation Method 2
the voltage source device contains an inductive or capacitive, direct current voltage converter
Implementation Method 3
The at least one charge storage device is configured to receive a clamp discharge current and temporarily store electrical charges from the clamp carrier in the storage capacitance
Implementation Method 4
The electrostatic holding forces are produced in that a high voltage is applied to the electrode device and the clamp carrier is correspondingly electrically charged. The charged clamp carrier attracts the component so that this adheres to the exposed surface
Data Source
AI summary
An electrostatic holding device (100) for holding component (1) by electrostatic holding forces includes clamp carrier (10) which has electrode device (11) and is configured for receiving component (1), voltage source device (20) for provision of a source charge current for charging clamp carrier (10), source switching device (30) which is arranged for a switchable connection of voltage source device (20) with electrode device (11), and at least one charge storage device (40, 40A, 40B) which has storage capacitor (41, 41A, 41B) and is configured to receive a clamp discharge current and temporarily store electrical charges of clamp carrier (10) in storage capacitor (41, 41A, 41B) and provide a storage charge current for charging clamp carrier (10). Also described is a method for operating holding device (100) and transfer circuit (200) for transmitting charges from working capacitor (201) to storage capacitor (202).