Electrostatic Loudspeaker Membrane Out-of-Plane Displacement

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Solution Overview

Problem

Microscopic electrostatic loudspeakers face challenges in achieving large out-of-plane displacement due to their small size and structural limitations, which restricts their sound pressure generation capabilities.

Innovation Solution

The design incorporates a membrane structure with a central and circumferential portion, where the central membrane portion extends through an opening in the electrode structure, utilizing electrostatic forces to build kinetic energy and achieve significant out-of-plane displacement, enhanced by additional mass and structural features like corrugations or hinges for increased displacement and sound pressure.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If the loudspeaker is scaled down to microscopic size, then miniaturization is achieved, but displacement capability deteriorates

Engineering Contradiction:
ImprovesizeVSAvoiddisplacement
Core Design Contradiction:
Volume of moving objectVSLength of moving object

Solution Approach 1:

The invention transitions the membrane motion from planar (in-plane) to three-dimensional (out-of-plane) by utilizing the vertical dimension. The membrane is configured to move perpendicular to the substrate surface, leveraging the third dimension to achieve large displacement amplitudes despite the microscopic footprint of the device.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The system employs dynamic operation where the membrane is driven into large amplitude oscillations. By using alternating electrostatic fields that switch polarity, the membrane is accelerated back and forth through the opening, converting static structural constraints into dynamic motion that achieves substantial displacement.

Inventive Principle:
Principle #15Dynamics

2Speed

If the membrane is made light to improve frequency response, then frequency range is improved, but sound pressure generation deteriorates

Engineering Contradiction:
Improvefrequency responseVSAvoidsound pressure
Core Design Contradiction:
SpeedVSForce

Solution Approach 1:

The membrane is driven by periodic alternating electrostatic fields that accelerate the membrane back and forth through the opening. This periodic acceleration builds up kinetic energy during each half-cycle, allowing the membrane to achieve high velocities (good frequency response) while maintaining sufficient mass for sound pressure generation.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The membrane is accelerated during each half-cycle to build kinetic energy before passing through the opening. This preliminary acceleration ensures that the membrane reaches optimal velocity for frequency response while the accumulated kinetic energy translates to sufficient displacement amplitude for sound pressure generation.

Inventive Principle:
Principle #10Preliminary action

3Ease of manufacture

If the membrane moves in-plane to achieve displacement, then manufacturing is simplified, but out-of-plane displacement capability deteriorates

Engineering Contradiction:
ImprovemanufacturingVSAvoidout-of-plane displacement
Core Design Contradiction:
Ease of manufactureVSLength of moving object

Solution Approach 1:

The invention deliberately chooses out-of-plane motion perpendicular to the substrate rather than in-plane motion. This dimensional transition enables large displacement amplitudes in the vertical direction while maintaining compatibility with planar MEMS fabrication processes for the electrode and membrane structures.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

A thin flexible membrane is used that can be fabricated using standard MEMS techniques. The membrane's flexibility allows it to undergo large out-of-plane deflections and oscillations through the opening when subjected to electrostatic forces, achieving substantial displacement despite its thin profile.

Inventive Principle:
Principle #30Flexible shells and thin films

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for larger displacement and sound pressure levels, effectively addressing the limitations of microscopic electrostatic loudspeakers by leveraging kinetic energy and structural enhancements for improved performance.

Implementation Method 1

The electrode structure is configured to electrostatically interact with the membrane structure for causing a movement of the membrane structure

Methodology Applied
Scientific EffectElectrostatic force: Electrostatics

Implementation Method 2

The central membrane portion is configured to extend at least partially through the opening when being in an end position of the movement of the membrane structure

Methodology Applied
Scientific EffectKinetic energy: Inertia

Data Source

PatentEP2582156B1Electrostatic loudspeaker with membrane performing out-of-plane displacement
Publication Date: 2018.01.17 INFINEON TECHNOLOGIES AG
  • EP2582156B1 patent drawingFigure 1A~1B
  • EP2582156B1 patent drawingFigure 2A
  • EP2582156B1 patent drawingFigure 2B

AI summary

An electrostatic loudspeaker comprises a membrane structure and an electrode structure. The membrane structure comprises a central membrane portion and a circumferential membrane portion. The electrode structure is configured to electrostatically interact with the membrane structure for causing a movement of the membrane structure along an axis of movement. The electrode structure comprises a circumferential electrode portion and an opening, the circumferential electrode portion being substantially aligned to the circumferential membrane portion and the opening being substantially aligned to the central membrane portion with respect to a direction parallel to the axis of movement. In an end position of the movement of the membrane structure, the central membrane portion is configured to extend at least partially through the opening. A method for operating an electrostatic loudspeaker and a method for manufacturing an electrostatic loudspeaker are also described.