Electrostatic Deposition Mask Layout for OLEDoS Gap Reduction
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Solution Overview
Problem
The gap between the deposition mask and the deposition substrate in high-resolution display panel manufacturing can lead to shadow defects and color mixing defects, particularly in the production of high-resolution organic light-emitting diode on silicon (OLEDoS) displays, which require a deposition mask with precise alignment.
Innovation Solution
A deposition mask design featuring a substrate with cell regions divided by a lip region, containing a mask membrane with parallel first and second lines, and voltage pads to generate electrostatic forces, reducing the gap between the mask and substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a mask membrane is formed of an inorganic film to manufacture high-resolution display panels, then the mask can provide precise patterning for high PPI displays, but the weight of the mask membrane increases causing a gap between the mask and deposition substrate
Solution Approach 1:
The mask membrane is divided into multiple segments (first mask membrane and second mask membrane) that can be independently supported. This segmentation allows each segment to be lighter while maintaining overall patterning precision, reducing the gap between mask and substrate.
Solution Approach 2:
The invention introduces a vertical support structure (third mask membrane extending in the thickness direction) to compensate for the gap caused by weight. This adds a dimensional solution (vertical support) to counteract the horizontal gap problem created by mask weight.
2Reliability
If the mask membrane weight is reduced to minimize the gap between mask and substrate, then shadow defects and color mixing defects are reduced, but the mask membrane may lack sufficient structural stability
Solution Approach 1:
The mask employs composite structures combining different mask membrane materials with different properties. The first and second mask membranes provide patterning functionality, while the third mask membrane provides structural support and gap compensation, creating a composite system that achieves both reliability and strength.
Solution Approach 2:
A third mask membrane is introduced that extends in the thickness direction to provide vertical support. This dimensional addition reinforces the overall mask structure without interfering with the horizontal patterning function, simultaneously achieving structural stability and deposition quality.
3Manufacturing precision
If a high-resolution deposition mask is implemented to achieve approximately 3000 PPI or more, then display resolution is improved, but the gap between mask and deposition substrate increases due to mask membrane weight
Solution Approach 1:
The mask membrane is segmented into multiple functional parts (first and second mask membranes for patterning, third mask membrane for support). This segmentation allows the patterning regions to remain thin and precise for high resolution while the support structure compensates for gap distance.
Solution Approach 2:
The third mask membrane extends in the thickness direction to provide vertical support, addressing the gap distance problem through a dimensional solution that does not compromise the horizontal resolution capability of the patterning mask membranes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces shadow defects and color mixing defects by maintaining precise alignment and contact between the mask and substrate, enhancing display quality in high-resolution wearable devices.
Implementation Method 1
based on voltage of a first value applied to the first line and voltage of a second value applied to the second line, the first line and the second line are configured to generate an electrostatic force associated with chucking deposition equipment
Data Source
AI summary
A deposition mask and deposition equipment including the deposition mask are provided. The deposition mask includes a substrate comprising a plurality of cell regions and a lip region dividing the plurality of cell regions, a mask membrane disposed on the plurality of cell regions of the substrate, a first line and a second line disposed on the lip region of the substrate, wherein the first line and the second line extend between neighboring cell regions of the plurality of cell regions, a first pad configured to provide a voltage of a first value to the first line from the outer edge of the substrate, and a second pad configured to provide a voltage of a second value to the second line from the outer edge of the substrate.