Electrostatic Mask Seating for Precise OLED Deposition
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Solution Overview
Problem
Existing deposition apparatuses face challenges in easily seating a deposition mask on a substrate during the manufacturing of organic light emitting diode (OLED) display devices, which is crucial for forming light emitting layers.
Innovation Solution
A deposition apparatus comprising a mask frame, an opening sheet, a deposition mask, and an electrostatic chuck, where the deposition mask includes a polymer mask with a conductive layer, and substrates are grounded with swapped AC power to generate electrostatic forces for precise mask seating.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a deposition mask is used in existing deposition apparatuses, then organic materials can be deposited to form light emitting layers, but the mask seating process becomes difficult and complex
Solution Approach 1:
The patent replaces mechanical mask seating mechanisms with an electrostatic field-based system. An electrostatic chuck generates an electrostatic field that interacts with the deposition mask to achieve automatic positioning and seating, eliminating the need for complex mechanical alignment and seating operations while maintaining precise deposition accuracy
Solution Approach 2:
The patent changes the physical state and properties of the deposition mask by applying AC power to generate an electrostatic field. This parameter change enables the mask to be attracted and held in position by electrostatic forces, transforming the seating process from a mechanical operation to an electromagnetic field-based operation that is easier to control and more precise
2Measurement precision
If AC power is applied to the deposition mask, then electrostatic force is generated for precise mask positioning, but device complexity increases
Solution Approach 1:
The electrostatic chuck serves multiple functions: it generates the electrostatic field for mask positioning, holds the mask in place during deposition, and can be integrated with existing vacuum chamber systems. This multi-functionality reduces the need for separate positioning mechanisms, thereby limiting the increase in device complexity despite the addition of AC power supply components
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables easy and precise seating of the deposition mask on the substrate, ensuring accurate deposition of organic materials for forming light emitting layers, thereby enhancing the manufacturing process of OLED display devices.
Implementation Method 1
An electrostatic force is generated in the electrostatic chuck to dispose a substrate on a surface of the electrostatic chuck
Implementation Method 2
AC power is applied to the deposition mask to dispose the deposition mask to be close to the substrate
Data Source
AI summary
An embodiment provides a deposition apparatus including a mask frame, an opening sheet, a deposition mask, and an electrostatic chuck. In the mask frame, a first opening part is defined. The opening sheet is disposed on the mask frame. In the opening sheet, a second opening part overlapping the first opening part is defined. The deposition mask is disposed on the opening sheet. In the deposition mask, a plurality of third opening parts overlapping the second opening part are defined. The electrostatic chuck is disposed on the deposition mask and on which a substrate is disposed. The substrate is disposed on a surface of the electrostatic chuck, and AC power is applied to the deposition mask.