Electrostatic Measuring System for Thin Film Transistors

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Solution Overview

Problem

Thin film transistors on glass substrates are sensitive to electrostatic discharge due to their small size and high impedance mismatch with transmission lines, leading to potential damage from electrostatic voltage, necessitating an effective method to determine their maximum endurable electrostatic voltage level.

Innovation Solution

An electrostatic measuring system comprising a pulse generator, an under test device, a variable resistor, and a detecting control system that adjusts resistance values based on detected voltage ringing ranges to match impedance and reduce voltage oscillations, using a pulse generator with transmission lines, a diode, and a switch device to generate and control pulse signals.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the thin film transistor size is reduced to meet adhesion requirements, then the adhesion performance is improved, but the sensitivity to electrostatic discharge increases

Engineering Contradiction:
Improveadhesion performanceVSAvoidelectrostatic discharge sensitivity
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent applies beforehand cushioning by introducing a variable resistor to adjust the impedance of the transmission line before electrostatic discharge occurs. By matching the impedance in advance, the system reduces voltage ringing and reflective waves that would otherwise amplify the harmful electrostatic discharge effects on the small-sized thin film transistor.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

2Reliability

If the thin film transistor size is reduced, then the adhesion performance is improved, but the electrostatic voltage endurance testing becomes more difficult

Engineering Contradiction:
Improveadhesion performanceVSAvoidelectrostatic voltage endurance measurement
Core Design Contradiction:
ReliabilityVSDifficulty of detecting and measuring

Solution Approach 1:

The patent applies feedback by using a detecting control system to monitor voltage ringing ranges and automatically adjust the variable resistor's resistance value. This closed-loop feedback mechanism makes it easier to measure electrostatic voltage endurance by automatically optimizing impedance matching conditions, thereby simplifying the measurement process for small-sized devices.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent applies self-service by enabling the measuring system to automatically adjust its own impedance matching conditions through the detecting control system. The system self-regulates the variable resistor based on detected voltage ringing, eliminating the need for manual impedance adjustment and making measurements easier for small-sized thin film transistors.

Inventive Principle:
Principle #25Self-service

3Device complexity

If impedance matching is not performed, then the device complexity is reduced, but voltage ringing and reflective waves increase

Engineering Contradiction:
Improveimpedance matching structureVSAvoidvoltage ringing and reflective waves
Core Design Contradiction:
Device complexityVSObject-generated harmful factors

Solution Approach 1:

The patent applies dynamics by using a variable resistor that can dynamically adjust its resistance value based on detection results. This dynamic impedance adjustment capability allows the system to minimize voltage ringing and reflective waves without requiring complex fixed impedance matching structures, thus resolving the contradiction between device complexity and harmful factor reduction.

Inventive Principle:
Principle #15Dynamics

Data Source

PatentUS7671619B2Measuring system and method
Publication Date: 2010.03.02 INNOLUX CORP
  • US7671619B2 patent drawing
  • US7671619B2 patent drawing
  • US7671619B2 patent drawing

AI summary

A measuring system comprises a pulse generator, an under test device, a variable resistor and a detecting control system. The pulse generator provides pulse signals with different voltage peaks to the under test device and the variable resistor. The variable resistor adjusts its resistance value according to a control signal. The detecting control system detects the voltage ringing ranges of the first terminal of the under test device at different resistance values. The detecting control system generates the control signal to adjust the resistance value of the variable resistor according to the voltage ringing ranges.