Electrostatic Pad Particle Removal in Transfer Chamber
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Solution Overview
Problem
Substrate transfer processes in semiconductor and flat panel display manufacturing generate particles due to friction, which are not effectively removed by existing methods, leading to contamination and poor process quality.
Innovation Solution
A transfer unit with an electrostatic pad system that attracts and removes both positively and negatively charged particles within the transfer chamber, combined with a fan filter unit for vertical air flow, to minimize particle generation and release.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a fan filter unit is used to remove particles, then relatively large particles can be removed, but relatively small particles are not removed effectively
Solution Approach 1:
The patent introduces an electrostatic pad as an intermediary component between the fan filter unit and the substrate transfer path. This electrostatic pad acts as a mediator that specifically targets and removes small particles that the fan filter unit cannot effectively capture, thereby complementing the existing filtration system and improving overall particle removal efficiency without requiring a complete system overhaul.
Solution Approach 2:
The patent changes the removal mechanism parameter from purely mechanical filtration (fan filter unit) to include electrostatic attraction (electrostatic pad). By introducing a different physical principle (electrostatic force) with different characteristics, the system can effectively remove particles of various sizes, particularly the small particles that elude mechanical filtration, thus resolving the contradiction between large particle removal and small particle removal effectiveness.
2Ease of operation
If drive members with friction are used to transfer substrates, then substrate transfer is enabled, but particles are generated due to friction
Solution Approach 1:
The patent converts the harmful effect of friction-generated particles into a beneficial situation by introducing the electrostatic pad that specifically targets and removes these particles. The friction that was previously only a source of contamination is now part of a controlled process where particles are generated but immediately captured by the electrostatic field, transforming a harmful byproduct into a manageable element of the transfer process.
Solution Approach 2:
The patent extracts the particle removal function from the drive member system itself and places it in a separate electrostatic pad component. Instead of trying to eliminate friction in the drive members (which would compromise substrate transfer capability), the system extracts and removes the harmful particles generated by friction through the electrostatic pad, allowing the drive members to continue their friction-based transfer function while the harmful byproduct is separately managed.
3Object-generated harmful factors
If the transfer chamber is sealed to prevent particle escape, then particle release is minimized, but particle accumulation inside may occur
Solution Approach 1:
The electrostatic pad serves as an intermediary particle capture mechanism inside the sealed transfer chamber. It intercepts particles before they can accumulate in large quantities, distributing and containing them in a controlled manner. This intermediary component allows the chamber to remain sealed for preventing external release while managing internal particle accumulation through active electrostatic capture.
Solution Approach 2:
The electrostatic pad provides self-service particle management within the sealed chamber. It automatically captures and holds particles through electrostatic attraction without requiring external intervention or breaking the seal. The pad essentially services itself by maintaining its electrostatic charge and continuously attracting particles, thereby managing internal contamination levels while the chamber maintains its sealed state for preventing external release.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively reduces particle contamination during substrate transfer, enhancing process cleanliness and preventing particle escape from the transfer chamber.
Implementation Method 1
an electrostatic pad that is provided in the transfer space and that electro-statically attracts particles in the housing
Data Source
AI summary
An apparatus for treating a substrate includes an index module and a treatment module that treats the substrate. The index module includes a load port on which a carrier having a plurality of substrates received therein is loaded and a transfer frame that is disposed between the treatment module and the load port and that transfers the substrate between the carrier loaded on the load port and the treatment module. The treatment module includes one or more process chambers and a transfer chamber that transfers the substrate to the process chambers. The transfer chamber includes a housing having a transfer space in which the substrate is transferred, a transfer robot that is disposed in the housing and that transfers the substrate between the process chambers, and an electrostatic pad that is provided in the transfer space and that electro-statically attracts particles in the housing.